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Provides a brief description of each change made to the manual.
Provides an overview of the Brooks Automation Atmospheric Single-Arm Robot.
Describes the robot's compatibility, mechanics, repeatability, and capabilities.
Details Top-Mount, Bottom-Mount, WETBOTs, and Dual-Arm robot types.
Covers robot accessories, end effectors, and laser scanners.
Describes robot systems including Smart Controller, Wafer Pre-Aligner, and Linear Track.
Explains interfacing via PC, Teach Pendant, and EQT.
Information about the manual scope, notes, hazards, and pictograms.
Introduces safety guidelines and covers regulatory compliance.
Provides safety considerations, personnel, and equipment guidelines.
Details robot safeguards, emergency stop circuits, and EMC/ESD protection.
Describes safety labels including laser, high voltage, and pinch point labels.
Covers SEMI S2 systems, safety interlocks, and mechanical hazards.
Details electrical hazards, lockout/tagout, and laser hazards.
Addresses gas, chemical, thermal, vacuum, and fire/explosion hazards.
Covers Teach Pendant usage, emergency stop, and dead-man switch.
Matrix for emergency actions and material safety information.
Introduces installation, site preparation, space, and environmental needs.
Provides instructions for unpacking and inspecting the robot and controller.
Details installation steps, tools, materials, and mounting configurations.
Covers moving the robot and leveling procedures.
Explains connections for robot, controller, power, vacuum, and communications.
Instructions for connecting Teach Pendant and installing EQT 32 interface.
Verifies connections, vacuum sensor, and performs safety checks.
Critical procedures for aligning and calibrating the robot system.
Reviews the major subsystems of the Brooks Automation Atmospheric Single-Arm Robot.
Describes the Smart Controller, Wafer Pre-Aligner, and Linear Track subsystems.
Covers user interfaces, end effectors, and laser scanners.
Describes robot and controller connections and communication ports.
Details power, electrical connections, barriers, fuses, and grounds.
Recommendations for managing robot cables to reduce noise and EMI.
Introduces robot operation and provides theory of operation.
Explains axis travel limits, homing procedures, and servo control.
Defines taught positions, offset, and stroke for GET/PUT operations.
Covers setting the Z-axis brake and flipper end effector setup.
Describes scanner mapping operations and teaching procedures.
Details robot parameters and how to adjust them using commands.
Provides complete adjustment and calibration directions for the robot.
Covers alignment strategy, process, tools, and required equipment.
Details leveling the robot and adjusting the vacuum sensor.
Guides flipper setup and tuning PID motor parameters.
Adjusts R-axis home flag, index position, and home offset.
Introduces the embedded control software and command options.
Describes software control, EPROMs, NVSRAM files, and macros.
Details coordinate files for stations and robot parameter files.
Lists useful commands and macros for operating the robot.
Provides maintenance schedules and procedures for preventive maintenance.
Instructions for cleaning the product using isopropyl alcohol and DI water.
Procedures for lubricating leadscrews with specific greases.
Instructions for replacing vacuum hoses in the outer arm link.
Procedure for inspecting the integrity of the robot's belts.
Uses EQT diagnostic mode to diagnose robot and controller problems.
Details diagnostic tests for NVS-Ram, Galil/IO, and Encoder.
Details diagnostic tests for Limit/Home, Servo, and Home Test & Set.
Details diagnostic tests for scaling, vacuum, and scanning.
Guides for running diagnostics using the Teach Pendant.
Describes troubleshooting methods and startup issues.
Troubleshooting guides for robot start-up and homing failures.
Troubleshooting for servo issues and common robot problems.
Guidance on using Teach Pendant and EQT 32 for diagnostics.
Checks robot status using STAT, RNCS, RLS, and GLST commands.
Lists common problems, causes, codes, and corrective actions.
Procedure for aftermath analysis and contacting technical support.
Provides a single location for specific information related to the robot.
Details internal operation in Operation and Teach modes.
Lists specifications for several approved laser scanners.
Details Hama Laser Sensor series, models, and available options.
Provides wiring schematics for identifying specific parts.
General