Atmospheric Single-Arm Robot Subsystems
User’s Manual System Overview
Brooks Automation
Revision 1
4-3
Smart Controller
The Smart Controller (ESC) controls the functions of the robot and other optional
moving parts. The ESC provides servo control, power supplies, an optional user inter-
face, and diagnostics for robots, pre-aligners, and track. The ESC and a host computer
can communicate across an RS-232 line or the ESC can run stand-alone.
The ESC requires ac power. The ESC power cable and signal cables provide all power
and control signals to the robot:
• The power cable provides 24 VDC for vacuum valves and PWM power for the
servo motors.
• The signal cables provide the Galil motion controller board with encoder sig-
nals from the servo motors and vacuum solenoid, brake, or scanner commands
to the robot, in addition to +5V and status indications.
For more information about the controller and printed circuit boards, refer to the
Smart Controller Hardware and Software User’s Manual.
Wafer Pre-Aligner
Wafer pre-aligners use high-resolution optical sensing (11.0 microns) to align wafers
of 3 in. to 12 in. (75 mm to 300 mm) without mechanical changes or readjustments.
Sensing capabilities automatically align to the major flat or notch. Direct encoder
feedback on the wafer chuck and a linear light source provide optimum illumination
of the charged couple device (CCD) sensor. For more information about the Brooks
Automation Atmospheric Pre-Aligner refer to the Brooks Automation Atmospheric
Pre-aligner User’s Manual.
Linear Track
The Linear Track automatically moves the robot laterally between multiple stations
that are positioned too far apart for a stationary robot. The Galil motion control board
controls the track as a single axis.
The track does not use the power supplies or amplifier boards in the ESC. It has an
integrated power supply and amplifier motor driver.
A track can be any length from 36 inches (457.2 mm) to 16 feet (4.88 mm) in 6-inch
(152-mm) increments.
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