Brooks ATM 300 - Alignment and Calibration

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Installation Atmospheric Single-Arm Robot

Alignment and Calibration User’s Manual

Brooks Automation

3-24 Revision 1

Alignment and Calibration

The Brooks Automation Atmospheric Single-Arm Robot must be aligned with the

system that it will be operating in. Note that even a small misalignment can interfere

with proper product operation and may cause wafer breakage.

The user must perform a complete alignment as part of installing the product in a sys-

tem. Additionally, proper alignment should be verified after servicing the product.

Refer to details in this chapter.

CAUTION

Do not attempt to use the Atmospheric Single-Arm Robot until the

alignment procedures have been completed.

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Main Page

Default Chapter4
- Table of Contents4
Figures12
Changes16
Introduction18
Chapter Contents19
- Atmospheric Single-Arm Robot Overview19
- About this Manual27
- Note, Hazards, Andpictograms28
- Specifications29
Safety34
- Regulatory Compliance35
- Safety Considerations36
  - Personnel Safety Guidelines36
  - Equipment Safety Guidelines37
- Robot Safeguards39
- Emergency Stop (EMS/MOFF)40
- EMC and ESD Protection42
  - ESD/EMI Precautions42
- Safety Labels43
  - Laser Warning Labels43
  - High Voltage Label44
  - Pinch Point Label for SEMI S2 Systems44
  - Fuse Label44
  - Underwriter Lab Label45
  - Manufacturing Labels45
- SEMI S2 Systems46
- Safety Interlocks47
- Mechanical Hazards48
- Electrical Hazards50
  - Lockout/Tagout50
  - Electrical Hazard Classifications51
- Laser Hazards53
- Gas Hazards54
- Chemical Hazards55
- Thermal Hazards56
- Vacuum Hazards57
- Fire and Explosion Hazards58
- Environmental Hazards59
  - Noise59
  - Vibration59
- Teach Pendant60
  - Using the EMERGENCY STOP60
  - Using the Dead-Man Switch60
- Matrix of Emergency and Corrective Response Actions62
- Material Safety Information63
- Brooks Automation Revision63
  - Isopropyl Alcohol Safety Information64
  - Msdss for C Grease65
  - MSDS for LG 2 Grease67
  - MSDS for Braycote 80369
Chapter Contents73
Installation73
- Site Requirements73
- Unpacking and Inspection75
  - Unpacking Instructions75
- Installation Procedure77
- Connecting the Robot and Controller82
- Setup89
- Safety Verification91
- Teaching and Operating92
  - Robot Axis and Station Naming Conventions92
- Check-Out94
- Alignment and Calibration95
Chapter Contents97
Subsystems97
- System Overview97
- User Interfaces99
- Robot Accessories100
  - End Effectors100
  - Laser Scanner100
Operational Interfaces103
- Interface Overview103
Operation108
Chapter Contents109
- Theory of Operation109
- Moving and Homing a Robot Axis110
- Teaching Stations111
- Setting the Optional Z-Axis Brake112
- Teaching a Robot Only113
- Teaching a Robot and Pre-Aligner114
- Scanner Mapping116
- Teaching the Scanner Mapping118
  - Teaching the Scanner in Special Situations120
- Robot Parameter File121
  - Adjusting Robot Parameters122
- Flipper End Effector123
Adjustments and Calibration128
Chapter Contents129
- Atmospheric Single-Arm Robot Alignment129
- Flipper Setup133
  - Setting up the Flipper133
- Tuning PID Motor Parameters136
  - To Tune the PID136
- Robot Radial Home Flag, Index, and Offset Adjustments138
Command Reference142
- Description143
- Commands and Macros for Robots145
  - Coordinate File145
Chapter Contents149
Maintenance149
- Preventive Maintenance149
  - Parts149
- Preventive Maintenance Schedule and Procedures150
- Cleaning151
- Robot Leadscrew Lubrication Procedure153
- Vacuum Hose Replacement for the Outer Arm Link158
  - Required Parts and Tools158
  - Procedure158
- Checking the Integrity of the Belts in the Robot161
  - Tools Required161
  - Procedure for the Inspection of the Robot Outer Link161
- Diagnostics for the Single-Arm Robot163
- Using the Teach Pendant to Run Diagnostics178
Troubleshooting191
- Troubleshooting Overview191
Contents192
- Troubleshooting Robot Start up192
- Using the Teach Pendant and EQT 32 to Troubleshoot199
- Common Problems200
- Brooks Automation Revision200
- Frequently Asked Questions201
  - What Do I Do if I Get a New Robot201
  - What Do I Do if I Get a New Controller201
- Checking Robot Status203
  - Using the STAT/STAT2 Command204
- Checking NVSRAM with RNCS Command207
- Checking Limit Switch Status with the RLS Command208
- Using the GLST Command212
Appendices222
- Appendix A: Factory Default Settings223
- Appendix B: Approved Laser Scanners224
  - Available Configurations of the HAMA Laser Sensors225

Brooks ATM 300 - Alignment and Calibration

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