Brooks ATM 300 - Thermal Hazards

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Atmospheric Single-Arm Robot Safety

User’s Manual Thermal Hazards

Brooks Automation

Revision 1

2-23

Thermal Hazards

The Atmospheric Single-Arm Robot does not use thermal heat during operation.

However, heating may occur in the robot or in one of the attached components. Be

aware of these areas during servicing of the robot.

WARNING

Allow the system chamber and robot to completely cool before per-

forming maintenance involving volatile chemicals.

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Main Page

Default Chapter4
- Table of Contents4
Figures12
Changes16
Introduction18
Chapter Contents19
- Atmospheric Single-Arm Robot Overview19
- About this Manual27
- Note, Hazards, Andpictograms28
- Specifications29
Safety34
- Regulatory Compliance35
- Safety Considerations36
  - Personnel Safety Guidelines36
  - Equipment Safety Guidelines37
- Robot Safeguards39
- Emergency Stop (EMS/MOFF)40
- EMC and ESD Protection42
  - ESD/EMI Precautions42
- Safety Labels43
  - Laser Warning Labels43
  - High Voltage Label44
  - Pinch Point Label for SEMI S2 Systems44
  - Fuse Label44
  - Underwriter Lab Label45
  - Manufacturing Labels45
- SEMI S2 Systems46
- Safety Interlocks47
- Mechanical Hazards48
- Electrical Hazards50
  - Lockout/Tagout50
  - Electrical Hazard Classifications51
- Laser Hazards53
- Gas Hazards54
- Chemical Hazards55
- Thermal Hazards56
- Vacuum Hazards57
- Fire and Explosion Hazards58
- Environmental Hazards59
  - Noise59
  - Vibration59
- Teach Pendant60
  - Using the EMERGENCY STOP60
  - Using the Dead-Man Switch60
- Matrix of Emergency and Corrective Response Actions62
- Material Safety Information63
- Brooks Automation Revision63
  - Isopropyl Alcohol Safety Information64
  - Msdss for C Grease65
  - MSDS for LG 2 Grease67
  - MSDS for Braycote 80369
Chapter Contents73
Installation73
- Site Requirements73
- Unpacking and Inspection75
  - Unpacking Instructions75
- Installation Procedure77
- Connecting the Robot and Controller82
- Setup89
- Safety Verification91
- Teaching and Operating92
  - Robot Axis and Station Naming Conventions92
- Check-Out94
- Alignment and Calibration95
Chapter Contents97
Subsystems97
- System Overview97
- User Interfaces99
- Robot Accessories100
  - End Effectors100
  - Laser Scanner100
Operational Interfaces103
- Interface Overview103
Operation108
Chapter Contents109
- Theory of Operation109
- Moving and Homing a Robot Axis110
- Teaching Stations111
- Setting the Optional Z-Axis Brake112
- Teaching a Robot Only113
- Teaching a Robot and Pre-Aligner114
- Scanner Mapping116
- Teaching the Scanner Mapping118
  - Teaching the Scanner in Special Situations120
- Robot Parameter File121
  - Adjusting Robot Parameters122
- Flipper End Effector123
Adjustments and Calibration128
Chapter Contents129
- Atmospheric Single-Arm Robot Alignment129
- Flipper Setup133
  - Setting up the Flipper133
- Tuning PID Motor Parameters136
  - To Tune the PID136
- Robot Radial Home Flag, Index, and Offset Adjustments138
Command Reference142
- Description143
- Commands and Macros for Robots145
  - Coordinate File145
Chapter Contents149
Maintenance149
- Preventive Maintenance149
  - Parts149
- Preventive Maintenance Schedule and Procedures150
- Cleaning151
- Robot Leadscrew Lubrication Procedure153
- Vacuum Hose Replacement for the Outer Arm Link158
  - Required Parts and Tools158
  - Procedure158
- Checking the Integrity of the Belts in the Robot161
  - Tools Required161
  - Procedure for the Inspection of the Robot Outer Link161
- Diagnostics for the Single-Arm Robot163
- Using the Teach Pendant to Run Diagnostics178
Troubleshooting191
- Troubleshooting Overview191
Contents192
- Troubleshooting Robot Start up192
- Using the Teach Pendant and EQT 32 to Troubleshoot199
- Common Problems200
- Brooks Automation Revision200
- Frequently Asked Questions201
  - What Do I Do if I Get a New Robot201
  - What Do I Do if I Get a New Controller201
- Checking Robot Status203
  - Using the STAT/STAT2 Command204
- Checking NVSRAM with RNCS Command207
- Checking Limit Switch Status with the RLS Command208
- Using the GLST Command212
Appendices222
- Appendix A: Factory Default Settings223
- Appendix B: Approved Laser Scanners224
  - Available Configurations of the HAMA Laser Sensors225

Brooks ATM 300 - Thermal Hazards

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