The ESC-2/FP Electrostatic Voltage Source, also referred to as the ESC-2, is a compact, lightweight system designed for energizing existing Electrostatic Chucks. It offers a full-service, independent repair center with experienced engineers and technicians on staff. The device is also available for custom engineering to ensure it meets specific equipment requirements.

Function Description

The ESC-2 operates as a fully functional standalone voltage source with low stored energy and built-in current limitations to safeguard processes from surges and arcs. It can be configured for either bipolar or unipolar output. The system provides parameter adjustments through continuously adjustable controls and is fully programmable for maximum user flexibility.

Important Technical Specifications

Output Capability:

True floating bi-polar output: Minimum path to chassis ground from any HV output terminal >10 Meg ohm.
Output to input isolation: > 500 Meg ohm (based on standard 5 KV dc hi-pot tests).
Output voltage/current: +/- 1000 VDC, 3mA maximum limit.
Output stability: 0.1% or better of output from 0 to full load.
Output ripple: Less than 0.2% at 50kHz operating frequency.
Output linearity: Better than 0.1% full scale.
Output polarity reversal: On command.
Output voltage balance: Better than 0.5% for matched loads.

Input Requirements:

DC power input: Single 24 Volt dc, 1 Adc (2 amp surge capability for 2 seconds at start-up).
Fusing Requirements: 1Amp 3ag or equivalent.

System Connections:

DC power input: 3 pin Molex type, non-reversible quick disconnect.
DC output: MHV connectors for HV+ and HV-, BNC connector for HV-CT.
Remote interface: 25 pin D-type female (DB-25f).

Mechanical Specifications:

Size: 8" W x 3.25" H x 6.25" D approx.
Weight: 2 lbs. approx.
Cooling: Free air.

Environmental Specifications:

Operating ambient temperature: 0 to 45° C.
Humidity: 10-90% non-condensing.
Storage temperature/humidity/air pressure: 0 to +70° C.

Usage Features

Operating Modes: The ESC-2 supports three operating modes:

Local Manual Operation: Controlled via front panel controls.
Remote Manual Operation: Controlled via the rear panel analog interface connector (DB25S).
Serial Remote Operation: Controlled via the RS-232C remote connection at the rear panel (DB9S).

Controls and Features:

Output Voltage Set Point: Continuously variable.
Output Current Limit: Continuously variable.
HV Enable Command: Digital input to enable high voltage.
HV Enabled Indicator: Provides status of high voltage.
Output Polarity Reversal: Command and disable function.
Output Discharge Command: Initiates discharge of the output.
Monitors: Output voltage (differential), center tap voltage, positive terminal output current, and negative terminal output current.
Output Protection: Active voltage and current limits, plus 330k ohm output limiting impedance.
RS-232c Serial Interface: For all remote control functions.

Monitors and Indicators: Analog outputs are available for:

Output differential voltage (0-10Vdc, 0-full output).
- terminal output current (0-10Vdc, 0-full output).
- terminal output current (0-10Vdc, 0-full output).
Center tap voltage (0-5Vdc, -500V to +500V).
High voltage “ON” indicator (emitter/collector pair from an opto-isolator).
Output polarity indicator (+15v for positive, 0v for negative).

Safety Features:

The unit defaults to a disabled state after power-up.
Output relays must be set before enabling high voltage.
The discharge signal acts as a high voltage lockout in remote manual mode.
Automatic discharge (ADIS) and automatic voltage reversal (AREV) functions are available.
The unit is equipped with low stored energy and built-in current limitations.

CE Installation Specifics: The equipment must be installed in accordance with the directives of prEN50178 and EN60204 / IEC-204-1.

Maintenance Features

Repair and Calibration:

Comdel provides field services, technical support, and repair services for both warranty and non-warranty products.
A Return Material Authorization (RMA) number is required for all equipment sent to the factory for service or calibration.
The warranty is void if the seal is broken, the warranty decal is removed, or if internal damage is suspected without contacting the factory.
There are no user or operator serviceable parts inside the equipment; all service must be referred to a qualified service technician.

Warranty:

Seller warrants equipment, service, software, repair, or parts for one year from start-up or 24 months after shipment (whichever comes first), or one year for service/repair.
Warranty is contingent on normal use, no shipping damage (reported within 30 days), receipt of RMA, absence of defects caused by improper conditions/misuse/abuse/negligence, and no unauthorized repairs or modifications.
Seller's liability is limited to repair or replacement of defective parts, correction of service, or refund of purchase/service price.

Customer Support:

Technical support is available by phone during regular business hours.
Online resources include FAQs, RMA request forms, and product manuals.
Contact information for Corporate Headquarters and US Regional Offices is provided.

Certifications:

The unit carries the ETL safety compliance mark to UL standard UL-1012.
Designed and labeled in compliance with CE mark certification requirements, with a Declaration of Conformity available from the manufacturer.

Comdel ESC-2/FP - Page 16

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