ESC-2/FP Manual
Before installing equipment, carefully read and familiarize yourself with the entire operations manual.
Observe and obey all WARNING and CAUTION notes provided.
1 Introduction
This user’s guide and manual includes installation guidelines, operation procedures and voltage requirements.
Also included are safety procedures and cautions during installation, which should be adhered to in order to protect
against injury or warranty violations.
• The ESC-2 Electrostatic Chuck Voltage Source is designed for use in environments where energizing an
existing Electrostatic Chuck is required.
• The ESC-2 is a compact, lightweight system, and is equipped with low stored energy and built-in current
limitations, which safeguard your process from surges and arcs.
• Each ESC-2 also contains parameter adjustments through continuously adjustable controls, and is fully
programmable to give the user maximum flexibility.
2 Safety Information
Warning Label and Safety Marking Explanations:
The following symbols and terms may be found on an instrument or used in this manual.
The CE mark indicates compliance with all currently applicable directives and standards.
This label indicates a general warning or caution condition.
This symbol indicates the presence of high voltages in or around the unit.
This symbol indicates a protective earth ground connecting point.
© 2006 Comdel, Inc.
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