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CyberOptics WaferSense User Manual

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CyberOptics
Semiconductor
WaferSense
ATS User’s
Guide

Table of Contents

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CyberOptics WaferSense Specifications

General IconGeneral
BrandCyberOptics
ModelWaferSense
CategorySemiconductors
LanguageEnglish

Summary

Chapter 2 Installing Your ATS

Installing the Software

Details the steps for installing the WaferSense ATS software on a computer, including system requirements.

Installing the Wireless Link

Guides users through connecting and installing the ATS wireless link module to a computer.

Chapter 3 Using Your ATS

Finding a Target

Explains how to locate and identify a target using the ATS TeachView application's live video.

Setting the Target Criteria

Guides users on configuring measurement tolerances and specific target values for accurate readings.

Chapter 4 Creating Target Configuration Files

Choosing a Target

Guidance on selecting appropriate physical features within equipment to serve as targets for ATS.

Measuring the Target

Explains how to take critical diameter and distance measurements for target configuration files.

Chapter 5 Maintaining Your ATS

Annual Factory Calibration and Battery Replacement

Information on required annual calibration and internal rechargeable battery replacement services.

Updating Your ATS Wafer Firmware

Instructions on how to use the ATS Firmware Updater to update the teaching wafer's firmware.

Chapter 6 Specifications

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