Edwards EPX180L

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Contents
A419-00-880 Issue F
28 Select line menu ........................................................................................................50
Tables
Table Page
1 LEDs on the EPX pumps ................................................................................................. 7
2 Connections ............................................................................................................... 7
3 EPX L pump labelling information (Refer to Figure 4) ............................................................. 9
4 EPX E (Refer to Figure 5) ..............................................................................................10
5 EPX N (Refer to Figure 6) ..............................................................................................11
6 General ...................................................................................................................15
7 Performance .............................................................................................................15
8 Electrical data ...........................................................................................................16
9 Cooling water supply ...................................................................................................17
10 Nitrogen supply .........................................................................................................17
11 Materials in contact with process gas ...............................................................................17
12 Tool connectors and mating tool connector kits ...................................................................34
13 Tool input signals to the pump system .............................................................................. 34
14 Output signals from the pump system ...............................................................................35
15 EUC and PDT menu structure .........................................................................................39
16 Maintenance plan .......................................................................................................58
17 Fault finding .............................................................................................................59
18 EPX EUC alarms and warnings .........................................................................................60
19 Accessory kits ...........................................................................................................63