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Edwards EPX HiVac Series User Manual
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A419-00-880
Issue F Original
Instruction Manual
EPX HiVac Series Dry Vacuum Pumps
Description
EPX
EPX TWIN
Item Number
Item Number
EPX180L
A419-41-xxx
A419-61-xxx
EPX180N
A419-42-xxx
A419-62-xxx
EPX180LE
A419-43-xxx
A419-63-xxx
EPX180NE
A419-44-xxx
A419-64-xxx
EPX500L
A419-51-xxx
A419-71-xxx
EPX500N
A419-52-xxx
A419-72-xxx
EPX500LE
A419-53-xxx
A419-73-xxx
EPX500NE
A419-54-xxx
A419-74-xxx
2
Table of Contents
Default Chapter
3
Table of Contents
3
Introduction
7
Scope and Definitions
7
Description
8
Process Compatibility Chart
8
The EPX L
9
The EPX LE
9
The EPX N
9
The EPX NE
9
Pump Protection Sensors
10
LED Status Indicators
10
The EPX L Dry Vacuum Pump
11
EPX Twin 180L Installation Details - Position of Additional Exhaust Port for EPX Twin Variants
12
Connections
13
EPX L Labels (Refer to Table 3)
14
EPX L Pump Labelling Information (Refer to Figure 4)
15
EPX E Dry Pump
16
EPX N Series Dry Pump
17
EPX N Serie Dry Pump
17
Connections
18
Control and Monitoring
18
EPX Pump Labels
18
End User Controller (EUC) Display
18
End User Controller
19
Technical Data
21
General
21
Performance
21
Electrical Data
22
Cooling-Water Supply
23
Nitrogen Purge System (EPX N Series Pumps)
23
Materials in Contact with Process Gases
23
Speed Curve (Mbar - Pa)
24
Speed Curve (Torr)
24
Speed Curve (Mbar - Pa) EPX and EPX Twin
25
Speed Curve (Torr) EPX and EPX Twin
25
EPX L Installation Dimensions (EPX500L Shown)
26
EPX LE Installation Dimensions (EPX500LE Shown)
27
EPX N Installation Dimensions (EPX500N Shown)
28
EPX NE Installation Dimensions (EPX500NE Shown)
29
Location of the Pump Centre of Gravity from Centre of the Top of the Inlet Flange
30
Gas Module Schematic
31
Installation
33
Safety
33
Unpack and Inspect
33
Securing the EPX Pump
34
Connect the Inlet to Your Process System
34
Connect the Outlet to Your Exhaust Extraction System
35
Nitrogen Purge (EPX N Series Pumps)
36
Leak Test the System
37
Connect the Cooling-Water Supply
37
Connect to Your Emergency Stop Circuit
38
Schematic Diagram of Emergency Stop Facility
38
Connect the EPX Pump to the Electrical Supply
39
Connect to Your Control Equipment
40
Inputs
40
Outputs
41
End User Controller (EUC) and Pump Display Terminal (PDT) Menus
43
Introduction
43
General Operation
44
The CANCEL Button
44
Display Text and Variable Text
44
Wrap-Around
45
Timeout
45
Menu Structure
45
Example
46
EUC and PDT Menu Logic
47
Switch on Menu
48
Switch off Menu
48
Normal Menu
49
Status Menu
50
Control Menu
51
Setup Menu (Sheet 1 of 2)
52
Software Version
54
Select Units Menu
55
Select Line Menu
56
Operation
57
Introduction
57
Flammable and Toxic Gases (EPX N Series Pumps)
58
Start-Up
58
Manual Shut-Down
59
Status and Fault Indications
59
Unplanned Shutdown and Alarms
59
Maintenance
61
Safety
62
Maintenance Plan
62
Inspect the Pipelines and Connections
63
Cleaning the Pump
63
Service the EPX Pump
64
Fault Finding
65
EPX EUC Alarms and Warnings
66
Storage and Disposal
67
Storage
67
Disposal
68
Service, Spares and Accessories
69
Introduction
69
Service
69
Index
71
4
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Edwards EPX HiVac Series Specifications
General
Brand
Edwards
Model
EPX HiVac Series
Category
Vacuum Cleaner
Language
English
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