Edwards EPX HiVac Series

© Edwards Limited 2007. All rights reserved. Page 17
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Technical data
A419-00-880 Issue F
2.4 Cooling-water supply
2.5 Nitrogen purge system (EPX N series pumps)
2.6 Materials in contact with process gases
Table 9 - Cooling water supply
Cooling-water items Reference data
Maximum supply pressure 7 barg, 7 x 10
5
Pa, 100 psig
Minimum required pressure differential across supply and return 2 bar, 2 x 10
5
Pa, 30 psi
Maximum supply temperature 35
o
C
Minimum supply temperature 15
o
C
Maximum particle size in supply 0.03 mm
2
, 4.6 x 10
-5
inch
2
Typical heat removed from EPX pump 1.3 kW, 5118 btu h
-1
Minimum water flow rate 2 l min
-1
, 31.7 US gallons h
-1
Connectors
Inlet Per customer specification
Outlet Per customer specification
Table 10 - Nitrogen supply
Gas Module Items Reference Data
Nitrogen supply interface 1/4 inch (6.35 mm) Tube
Maximum supply pressure 7 barg, 7 x 10
5
Pa, 100 psig
Minimum supply pressure 3.0 barg, 3 x 10
5
Pa, 45 psig
Minimum purity 0.9995
Typical nitrogen purge flow at a supply pressure of 3.0 barg 25 slm (17 slm Gas Ballast)
Table 11 - Materials in contact with process gas
Material items Reference data
Pump-body Hard anodised aluminium
Pump rotor Hard anodised aluminium
Internal shaft seals PTFE coated aluminium
O-rings Viton fluoroelastomer
Pump shaft Carbon steel
Gas module nitrogen components Stainless steel, hard anodised aluminium and viton