Edwards EPX HiVac Series

A419-00-880 Issue F
Page 18 © Edwards Limited 2007. All rights reserved.
Edwards and the Edwards logo are trademarks of Edwards Limited.
Technical data
Figure 8 - Speed curve (mbar - Pa)
Figure 9 - Speed curve (Torr)
1. EPX500
2. EPX180
1. EPX500
2. EPX180