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Edwards EPX HiVac Series

Edwards EPX HiVac Series
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A419-00-880 Issue F
Page 10 © Edwards Limited 2007. All rights reserved.
Edwards and the Edwards logo are trademarks of Edwards Limited.
Introduction
Figure 5 - EPX E dry pump
Table 4 - EPX E (Refer to Figure 5)
Number Description
1 Label - Product name.
2 XLR Connector - This may be used to connect a fab-wide network to allow remote monitoring
and control of the EPX Dry Pump.
3 Label - Warning do not remove cover until 4 minutes after disconnecting power from the
pump.
4 RJ12 Connector - This is used to connect the optional, external, PDT to the EPX Dry Pump.
5 End User Controller accessory - The End User Controller has an on-board display and keypad
that allows local control of the EPX Dry Pump. Refer to Section 1.8 and 4 for the operation of
this.

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