Edwards EPX HiVac Series

© Edwards Limited 2007. All rights reserved. Page 25
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Technical data
A419-00-880 Issue F
Figure 17 - Gas module schematic
1. Supply port
2. Solenoid valve
3. Fixed pressure regulator
4. Check valve
5. Flow switch
6. Fixed flow restrictors
7. Gas ballast port
7a. Alternative ballast port (unused)
8. Seal purge port
8a. Alternative seal purge port (unused)
9. Connector