Edwards EPX HiVac Series

© Edwards Limited 2007. All rights reserved. Page 19
Edwards and the Edwards logo are trademarks of Edwards Limited.
Technical data
A419-00-880 Issue F
Steady state speed curves showing the performance difference between the standard EPX ‘L’ and EPX TWIN ‘L’
variant.
Figure 10 - Speed curve (mbar - Pa) EPX and EPX Twin
Figure 11 - Speed curve (Torr) EPX and EPX Twin
1. EPX 180
2. EPX TWIN 180
1. EPX 180
2. EPX TWIN 180