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PA192-80M Series
entegris PA192-80M Series User Manual
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CRITICAL MATERIALS HANDLING
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B2
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Datu
m A
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Installation and use manual
200 MM WAFER CARRIER
INTERFACE MANUAL
2
Table of Contents
Overview
2
Table of Contents
2
General Terminology and Definitions
3
Definitions
4
Wafer Plane
5
Specification Purpose
5
Benefits
5
General Definitions
5
Specification Description
6
Specification Values
6
Use with Automated Equipment
6
Four Point Contact
7
Contact Location
7
Benefits of Four Point Contact
7
Equipment Interface
7
Wafer Carriers Included and Exceptions
7
Recommended Contact Points
7
General Interface Information
8
Print Based Interface Design
8
Interface Points: Wafers Horizontal
8
General Recommendations
8
Sample Interface Plate
8
Contact Area a
9
Contact Area B
9
Contact Area C
9
Interface Points: Wafers Vertical
10
General Recommendations
10
Sample Interface Plate
10
Contact Area a
10
Contact Areas B and C
11
Interface Points: Robotic Handling
11
General Recommendations
11
Robotic Handling Features
11
Endwall Flanges
11
H" Bar End Flanges
12
Endwall Handle
12
Top Flanges
12
Material Information
13
Material Properties and Equipment Interface
13
Static Protection
13
Moisture Absorption
13
Applications
13
Wafer Transport Carriers
13
Process Wafer Carriers
14
Detailed Material Properties
14
For more Information
15
Terms and Conditions
15
Product Warranties
15
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entegris PA192-80M Series Specifications
General
Brand
entegris
Model
PA192-80M Series
Category
Industrial Equipment
Language
English
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