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Explains the wafer plane concept and its advantages for predictable wafer location and transfer.
Details the offset dimension, tolerance, and typical specification values for wafer plane.
Describes the location of four-point contacts and their benefit for carrier orientation and placement.
Details equipment interface requirements and lists carrier types with/without four-point contact features.
Emphasizes using only recommended contact points for optimal and consistent wafer carrier interfaces.
General| Brand | entegris |
|---|---|
| Model | PA192-80M Series |
| Category | Industrial Equipment |
| Language | English |
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