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MOLBOX1 PLUS - V 6.00
Fluke MOLBOX1 PLUS - V 6.00 User Manual
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© 1995
-
2010 Fluke
Corporation, DH Instruments Di
vision
molbox1
+
™/mo
lbox1+S
molbloc
®
Ter
mina
l
(Ver. 6.00
and H
igher)
Opera
tion and M
aintena
nce M
anual
2
Table of Contents
Default Chapter
3
Table of Contents
3
Table of Contents
5
Tables
7
About this Manual
9
1 Introduction
11
Product Overview
11
Molbloc Flow Elements
12
Molbloc-L Flow Element
12
Molbloc-S Flow Element
13
Specifications
13
General Specifications
13
Reference Pressure Transducer (RPT) Specifications
14
Temperature Measurement Specifications
14
MFC Control Function (Optional) Specifications
15
Flow Measurement Specifications
15
Molbloc-L
15
Table 1. Molbloc-L Pressure Dependent Calibration Types
17
Table 2. Molbloc-L Ranges with Low Pressure and Downstream Calibrations
17
Table 3: Molbloc-L Ranges with High Pressure Calibrations
18
Molbloc-S
19
Table 4: Molbloc-S Calibration Types
21
See Section
21
Table 5: N2. Molbloc-S Flow in Nitrogen at Various Molbloc Upstream Pressures
23
Table 6: Ar. Molbloc-S Flow in Argon at Various Molbloc Upstream Pressures
23
Table 7: He. Molbloc-S Flow in Helium at Various Molbloc Upstream Pressures
24
Table 8: SF6. Molbloc-S Flow in Sulfur Hexafluoride at Various Molbloc Upstream Pressures
24
Helium He
24
Sulfur Hexafluoride SF -- N/A
24
N/A
24
Table 9: Xe. Molbloc-S Flow in Xenon at Various Molbloc Upstream Pressures
25
Table 10: C4H10. Molbloc-S Flow in Butane at Various Molbloc Upstream Pressures
25
N/A
25
Table 11: C2H6. Molbloc-S Flow in Ethane at Various Molbloc Upstream Pressures
26
Table 12: C2H4. Molbloc-S Flow in Ethylene at Various Molbloc Upstream Pressures
26
Table 13: H2. Molbloc-S Flow in Hydrogen at Various Molbloc Upstream Pressures
27
Table 14: CH4. Molbloc-S Flow in Methane at Various Molbloc Upstream Pressures
27
Table 15: C3H8. Molbloc-S Flow in Propane at Various Molbloc Upstream Pressures
28
Table 16: CF4. Molbloc-S Flow in Carbon Tetrafluoride at Various Molbloc Upstream Pressures
28
Table 17: C2F6. Molbloc-S Flow in Hexafluoroethene at Various Molbloc Upstream Pressures
29
Table 18: CHF3. Molbloc-S Flow in Trifluoromethane at Various Molbloc Upstream Pressures
29
Table 19: Air. Molbloc-S Flow in Air at Various Molbloc Upstream Pressures
30
Table 20: CO2. Molbloc-S Flow in Carbon Dioxide at Various Molbloc Upstream Pressures
30
Air Air
30
Carbon Dioxide CO
30
Table 21: CO. Molbloc-S Flow in Carbon Monoxide at Various Molbloc Upstream Pressures
31
Table 22: N2O. Molbloc-S Flow in Nitrous Oxide at Various Molbloc Upstream Pressures
31
Carbon Monoxide CO
31
Nitrous Oxide N 2 O
31
Nitrous Oxide N/A
31
Table 23: C4F8. Molbloc-S Flow in Octafluorocyclobutane1 at Various Molbloc Upstream Pressures
32
Table 24: O2. Molbloc-S Flow in Oxygen at Various Molbloc Upstream Pressures
32
Front and Rear Panels
34
Front Panel
34
Rear Panel
34
Figure 1. Molbox1+ Front Panel
34
Figure 2. Rear Panel
34
1 I N S T a L L a T I O
35
Unpacking and Inspection
35
Removing from Packaging
35
Inspecting Contents
35
Site Requirements
35
Table 25: Molbox1+ Parts List
35
Initial Setup
36
Preparing for Operation
36
Power Connection
36
Molbox1+ to Molbloc Connections
37
Gas Supply and Flowpath Connections
37
Vacuum Supply (Molbloc-S Only)
38
Communications Connections
38
MFC Control Option Connection
39
Power up and Verification
39
Power up
39
Check Proper Pressure Measurement Operation
39
Check Proper Temperature Measurement Operation
39
Check the MFC Control Function (Optional)
40
Leak Check
40
Check/Set Security Level
40
Additional Precautions to Take before Making Flow Measurements
40
Short Term Storage
41
3 O P E R a T I O
43
General Operating Principles
43
Molbloc Channel a & Channel B
43
Molbloc-L and Molbloc-S Operation
43
Figure 3. Molbox1+ Internal Pneumatic Schematic - CHANNEL a ACTIVE, Molbloc-L OPERATION
43
Flow Ready/Not Ready Indication
44
Molbloc-L Operation
44
Molbloc-S Operation
44
Reference Pressure Transducer (RPT) Overpressure
45
Molbloc-S BPR Limits
45
Main Run Screen
46
Table 26: Minimum Molbloc-S Critical Flow (Slm) in Nitrogen at Various Molbloc-S Downstream Pressures
46
Molbloc-L Operation
47
Molbloc-S Operation
48
Manual Operation
49
Keypad Layout and Protocol
49
Figure 4. Keypad Layout
49
Direct Function Keys Summary
50
Table 27: Summary of Molbox1+ Direct Function Key Operations
50
Direct Function Keys
51
Gas]
52
Molbloc-L Operation
53
Table 28. Available Molbloc-L Gases
53
Molbloc-S Operation
54
Unit]
56
Mass Flow Vs. Volume Flow
57
Volumetrically Based Mass Flow Units
58
Volumetrically Based Mass Flow Units at Various Reference Temperatures (UXXX)
59
Volume Flow Units (Vlm)
59
Customizing FLOW Units Available under the UNIT Function
60
Table 29. Available Flow Units
60
Tare]
61
1Tare
62
Figure 5. Molbox1+ Internal Pneumatic Schematic
62
Figure 6. Molbox1+ Internal Pneumatic Schematic - TARING CHANNEL A, Molbloc-S OPERATION
65
2Purge
66
Figure 7. Molbox1+ Internal Pneumatic Schematic - PURGING CHANNEL a
66
3Leak Check
67
Figure 8. Molbox1+ Internal Pneumatic Schematic - LEAK CHECK Molbox CHANNEL a
69
Figure 9. Molbox1+ Internal Pneumatic Schematic - SYSTEM LEAK CHECK - CHECKING OFFSET and STABILITY
70
Figure 10. Molbox1+ Internal Pneumatic Schematic - SYSTEM LEAK CHECK on CHANNEL a - CHECKING OFFSET and STABILITY
73
4Autoz
74
5BPR> (Molbloc-S Operation Only)
79
P&T] (Pressure and Temperature)
80
Molbloc-L Operation
81
MOLBLOC-S Operation
81
Display]
82
1Rate
83
2Avg> (Average)
84
Hi/Lo
84
4Total> (Totalizer)
85
5Unit
87
Table 30. Flow Units and Corresponding Total Mass or Volume Units
87
6Deviation
88
7Freeze
90
8Clean
90
[A/B]
91
Mfc](Optional)
91
MFC Run Screens
92
MFC Profiles
93
Units of Measure When Using the MFC Control Option
93
Res]
94
Setup]
94
1Molbloc
95
Molbloc-L and Molbloc-S Size and Range Designations
96
Table 31. Molbloc-L Size and Nominal Range Designations
96
Table 32. Molbloc-S Size and Pressure to Flow Conversion Ratio (K F)
96
2Stab
97
3Adj
97
4A_B
98
General Operation (Aspects Common to both A_B Modes)
99
A+B Mode
100
5Mfc
101
6Reg
102
7Flowu
103
8Presu
103
9Tempu
104
Table 33. Pressure Units of Measure Available
104
Special]
105
1Reset
105
1Sets
106
2Units
106
3Mfc
107
4Cal
107
5All
107
2Level
108
Security Levels
108
Table 34. Security Levels - Functions NOT Executed Per Function/Level
109
3Ul
111
Upper Limit Alarm and Sequence
112
4Cal
112
5Prefs
112
1Scrsvr
113
3Id
113
3Time
114
6Remote
114
COM1 and COM2
115
Ieee-488
115
RS232 Self-Test
115
Table 35. COM1 and COM2 Available Settings
115
7Drivers
116
8Head
116
9Bpr
117
Figure 11. Molbox1+ Internal Pneumatic Schematic - Molbloc-S OPERATION
118
Figure 12. Molbox1+ Internal Pneumatic Schematic - Molbloc-S OPERATION
118
4 Remote Operation
121
Overview
121
Interfacing
121
RS232 Interface
121
Com1
122
Com2
122
Table 36. COM1 DB-9F Pin Designation
122
Table 37. COM2 DB-9M Pin Designation
122
Ieee-488 (Gpib)
123
Commands
123
Command Syntax
123
Command Summary
123
Table 38. Command Summary
123
Error Messages
125
Table 39. Error Messages
125
Command Descriptions
126
IEEE Std. 488.2 Common and Status Commands
126
Molbox1+ Commands
128
Status System
148
Status Reporting System
148
Status Byte Register
148
Table 40. Status Byte Register
148
Figure 13. Status Byte Register
149
Standard Event Register
150
Table 41. Standard Event Register
150
1000 M a I N T E N a N C E , Ad J U S T M E N T S a N D C a L I B R a T I O
151
Product Overview
151
Calibration of Reference Pressure Transducers (RPTS)
152
Principle
152
PA and PM Coefficients
152
Equipment Required
153
Set-Up and Preparation
153
Viewing and Editing RPT Readings and Calibration Information
154
Viewing RPT Outputs
154
Viewing and Editing RPT PA, PM and Calibration Date
155
Figure 14. Molbox1+ Internal Pneumatic Schematic
155
RPT Calibration/Adjustment Procedure Without Using Caltool for Rpts Software
156
MFC Control Function Adjustment
158
OHMIC Measurement [Temperature] System Verification
159
OHMIC Measurement System Calibration/Adjustment Procedure
161
Molbloc Flow Adjustment
162
Molbloc Adjustment Procedure Without Using Caltool for Molbloc Software
163
Reloading Embedded Software into Molbox1+ Flash Memory
164
Reloading Molbloc EEPROM File
164
Overhaul
164
6 Troubleshooting
167
Table 42. Troubleshooting Checklist
167
Overview
167
7 A P P E N D I
173
7. Appendix Conversion of Numerical Values
173
Pressure
173
Table 43. Pressure Unit Conversions
173
Table 44. Temperature Unit Conversion
173
Temperature
173
Flow
174
Table 45. Conversions from Kg/S to Sccm at 0 °C for Various Gases
174
Table 46. Conversions from Sccm at 0 °C to Other Volumetrically Based Flow Units
174
Corresponding Units at Another Temperature (Uxxx)
175
Table 47. Conversions from Volumetrically Based Flow Units at 0 °C to
175
Table 48. Conversions from Kg/S to Mole/S for Various Gases
175
Table 49. Conversion from Mole/S to Pccm
175
Table 50. Conversion from Sccm at 0 °C to Volume Flow Units at Another Pressure and Temperature
176
Table 51. Driver/Max Current Per Output
176
Valve Drivers
176
Figure 15. Cable Driver Ports
177
Table 52. External Drivers
177
MFC Control Function
178
MFC Connector
178
Detailed Signal Descriptions
178
Table 53. Interface Cable Building Instructions
178
Popular Configurations
179
Table 54. Common MFC Connector Pin out
180
Table 55. Brooks MFC Connector Pin out
180
Table 56. DHI Authorized Service Providers
181
Warranty Statement
181
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Fluke MOLBOX1 PLUS - V 6.00 Specifications
General
Brand
Fluke
Model
MOLBOX1 PLUS - V 6.00
Category
Touch terminals
Language
English
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