X
Y
Edge Control and Positioning Mode
+
Control output
Glass Edge Mode
+
Calculation function
Feedback control using edge position control Positioning control of the angle of a wafer
Outputs the edge position information to
a control device. It is possible to send the
information via an analog output, BCD output,
or RS-232C output according to the type of
the control device instead of using a PLC.
Positioning of a glass substrate Edge control of a transparent sheet
Easy measurement with the calculation function
Amplifier or
communication
unit
Measures a position information
Easy control when used with a servomotor (example)
Analog output
BCD output
RS-232C output
BUILT-IN CALCULATION FUNCTIONS ALLOW FOR
AN EVEN WIDER VARIETY OF APPLICATIONS
The main unit of the amplifier can
communicate with the expansion units.
When positioning an object such as
a panel, it is possible to calculate a
misalignment amount by calculating the
data obtained by two sensor heads.
8
Control device
A−B :
B :
C :
Misalignment measurement
Y-axis position measurement
X-axis position measurement
Main unit
Expansion unit 1
Expansion unit 2
AB
C
X
Y