Operating Manual
Operation instructions Page18-2
18.1 Common spare parts list
Power feedthrough:1500439 Liquid feedthrough:C910003/4 BNC connector:9005181
150mm Rotary cover:9002012 Inner Gloveport cover:9002371 Solvent filter：9004451
Charcoal ：2604519 Copper catalyst：2600839 Dust filter:9004513
Flow meter:3240052 Electromagnetic valve：4600977 Glove port：7067141/7067142
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