Operating Manual
Operation instructions Page12-1
Chapter12
12．1 Summary
12
．2 Working Principle
12
．3 Important notes
12．4 Transferring Material into the Box
12．4．1 Preparation
12．4．2 Evacuate
12．4．3 Refill
12．4．4 Take material out of antechamber
12
．5 Transferring Material out of the Box
12．5．1Preparation
12．5．2 Take material out of antechamber
12．6 Round Antechamber
12．6．1 Open/Close antechamber door
Diagram
Dia. 1
：
Working principle of antechamber
Dia. 2
：
Evacuate
Dia. 3
：
Refill
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