Table 3-2. Sensor Response to Interferants (continued)
INTERFERANT
CONCEN
-TRATION
(PPM)
CLO
2
HF PH
3
ASH
4
SiH
4
GeH
3
B
2
H
6
Br
2
Acetone 1000 0 No Data No Data No Data No Data No Data No Data 0
Acetylene 12000 0 No Data No Data No Data No Data No Data No Data 0
Ammonia 25 0 0 No Data No Data No Data No Data No Data 0
Arsine 1 0 No Data 0.7 1 1 1 5 0
Benzene 20 0 No Data No Data No Data No Data No Data No Data 0
Bromine 2 1 No Data No Data No Data No Data No Data No Data 2
Carbon Dioxide 5000 0 No Data No Data No Data No Data No Data No Data 0
Carbon
Disulfide
150No Data000000
Carbon
Monoxide
100 0 No Data 0 1 0 0 0 0
Chlorine 5 2.5 5 No Data No Data No Data No Data No Data 4
Diborane 20 0 No Data 3.5 5 4 5 20 0
Ethylene 50 0 No Data 0.5 1 1 1 2 0
Ethyl Alcohol 100 0 No Data No Data No Data No Data No Data No Data 0
Ethylene Oxide 10 0 No Data No Data No Data No Data No Data No Data No Data
Ether 400 0 No Data No Data No Data No Data No Data No Data 0
Fluorine 5 1 No Data No Data No Data No Data No Data No Data 2
Freon 12 1000 0 0 0 0 0 0 0 0
Germane 1 0 No Data 0.7 1 1 1 5 0
Hexane 500 0 No Data No Data No Data No Data No Data No Data 0
Hydrogen 500 0 No Data 0 0 0 0 0 0
Hydrogen
Chloride
50 0 30 No Data No Data No Data No Data No Data 0
Hydrogen
Cyanide
10 0 0 No Data No Data No Data No Data No Data 0
Hydrogen
Fluoride
10 0 No Data No Data No Data No Data No Data No Data 0
Hydrogen
Sulfide
10 0 0 No Data No Data No Data No Data No Data 0
MEK 200 0 No Data No Data No Data No Data No Data No Data 0
Mercaptan
(Methyl)
5 0 No Data No Data No Data No Data No Data No Data 0
Methane 5000 0 No Data No Data No Data No Data No Data No Data 0
Nitric Oxide 100 0 2 No Data No Data No Data No Data No Data 0
Nitrogen
Dioxide
5 0.2 2.5 No Data No Data No Data 0.5 No Data 0.4
Phosphine 0.5 0 No Data 0.5 1 0.7 1 3 0
Silane 5 0 No Data 0.1 0.2 5 0.2 15 0
Sulfur Dioxide1002.70.512360
Tichloroethylene
1000 0 No Data No Data No Data No Data No Data No Data 0
Chapter 3, Specifications
3-7