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Pfeiffer Vacuum Adixen A1803H User Manual

Pfeiffer Vacuum Adixen A1803H
144 pages
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Operating instructions
Operating instructions
Original
Original
BetriebB
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A3H Series
Multistage Roots dry pump
EN
EN
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Pfeiffer Vacuum Adixen A1803H Specifications

General IconGeneral
BrandPfeiffer Vacuum
ModelAdixen A1803H
CategoryWater Pump
LanguageEnglish

Summary

Operating Instructions A3H Series

Labelling and Safety Symbols

Safety Instructions and Precautions

Guidance on safe product usage, operator responsibilities, and adherence to regulations.

Pump Labels and Hazard Warnings

Details specific pump labels indicating hazards like hot surfaces, moving parts, and voltage.

M4 Monitoring System

System Principle and Components

Explains the M4 monitoring system's principle, including electrical cabinet, electronic cabinet, and hand-held remote.

M4 Monitoring Characteristics and Main Functions

Outlines the key characteristics and primary functions of the M4 monitoring system.

Technical Characteristics

Start-up Procedures

General Safety Instructions

Provides essential safety guidelines to be followed before and during pump start-up.

Overview and Handling Precautions

Covers general overview, safe handling, and precautions regarding product weight and tilting.

Electrical Safety and Hazardous Gas Handling

Details electrical safety measures, monitoring purge flow, and handling hazardous process gases.

Cooling Water, N2 Purge, and User Responsibility

Highlights safety related to cooling water, N2 purge, and the user's ultimate responsibility for safe operation.

Safety Interlocks, Emergency Stop, and Maintenance

Explains safety interlocks, emergency stop functions, vacuum exposure, and requirements for maintenance personnel.

Hook-up Requirements

Packaging, Weight, Water Cooling, and Gas Connections

Specifies packaging dimensions, weight, water cooling circuit requirements, and inert gas connections.

Electrical and Pumping Circuit Connections

Details electrical power requirements, breaker ratings, and pumping circuit connection specifications.

Positioning the Pump

Installation Location and Stability Precautions

Guides on selecting an installation location and ensuring pump stability, avoiding tilting.

Connection to the Cooling Circuit

Inert Gas Purge Connection (N2)

Electrical Connection

Customer Electrical Installation Protection

Outlines requirements for electrical installation protection, including circuit breakers and disconnecting devices.

Differential Circuit Breaker and Plug Connection

Covers the use of differential circuit breakers and the procedure for connecting the power plug.

Checking Rotation Direction at Initial Start-up

HHR Control and Rotation Check

Details how to control the pump using the hand-held remote and check the correct rotation direction.

Connection to the Pumping Circuit

Emergency Stop Plug Connection

Operation Safety (Harsh Processes)

Safety Recommendations for Harsh Processes

Provides crucial safety recommendations when operating the pump under harsh process conditions.

Shutdown Procedure for Discontinuous Operation

Details the recommended procedure for safely shutting down the pump for discontinuous operation.

Safety Information for SiH4/H2 Processes

Covers critical safety information and risks associated with processes using SiH4 and H2 gases.

General Recommendations for Harsh Processes

Offers general recommendations regarding leak tightness, N2 purge, and communication with process tools.

Specific Recommendations for SiH4 and H2 Processes

Provides specific recommendations for processes involving SiH4 and H2 to mitigate risks.

M4 Monitoring System Parameters

Starting the M4 Monitoring System

Pump Start-up and Parameter Access

Guides on starting the pump and accessing system parameters for configuration.

M4 Monitoring System Function Table

Using the M4 Monitoring System for Pumping

Operation Settings and Neutral Gas Purge

Explains operation settings, neutral gas purge control, and pump start-up options.

Pump Start-up and Parameter Display

Guides on initiating pump start-up and accessing displayed operating parameters.

Operation Monitoring and Pumping Shut-down

Covers monitoring pump operation, handling incidents, and the procedure for pumping shut-down.

Maintenance

Safety Instructions Related to Maintenance

Outlines critical safety instructions and precautions to be observed during maintenance operations.

Skilled Operator Safety and Hazard Warnings

Details safety requirements for maintenance personnel and various hazard warnings.

Process Gas Safety, Cleaning, and Workspace Lighting

Covers safety related to process gases, cleaning procedures, and workspace illumination requirements.

Diagnosis and Troubleshooting

Troubleshooting Categories: Pump Start-up Issues

Categorizes common troubleshooting scenarios, starting with issues related to pump start-up.

Pump or Roots Does Not Start

Troubleshooting Mains Presence and HHR Issues

Provides troubleshooting steps for when the mains presence light or HHR display is not functioning.

Pump Running with Warning or Alarm Message

Message List and Interpretation

Provides a list of warning and alarm messages, their corresponding causes, and troubleshooting steps.

Troubleshooting Exhaust Pressure, FB Power, and Logic Inputs

Details troubleshooting for exhaust pressure, FB power, and logic input related warnings or alarms.

Troubleshooting Speed Control, Water Flow, and Power Supply

Addresses troubleshooting for speed control, water flow issues, and power supply warnings or alarms.

Troubleshooting FB Motor Temperature, Inlet Valve, and Purge

Guides on troubleshooting FB motor temperature, inlet valve operation, and purge system faults.

Troubleshooting FB HP Temperature and Roots Motor Temperature

Covers troubleshooting for high FB HP temperature and Roots motor temperature issues.

Troubleshooting Roots Motor Temperature, System Messages, and Maintenance Threshold

Addresses troubleshooting for Roots motor temperature, system messages, and maintenance threshold alerts.

Troubleshooting FB/Roots Contactors, Breakers, and LP FB Temperature

Provides troubleshooting for contactors, breakers, and LP FB temperature faults.

Pump Performance Issues

Troubleshooting Bad Vacuum, Mechanical Noise, and No N2 Purge

Addresses performance issues like poor vacuum, mechanical noise, and lack of N2 purge.

Safety Instructions for Pump Relocation

Operator Safety, Electrical Hazards, and Hazardous Energies

Covers safety precautions for operators, electrical hazards, and management of pressurized hazardous energies.

Protection Against Corrosive Gases and User Advice

Provides guidance on protection against corrosive gases and advice for users during relocation.

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