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Provides general guidance on operating the plasma cleaner, manual vs. recipe modes.
Outlines the step-by-step procedure for operating the plasma cleaner.
Explains the layout and functionality of the main user interface screen.
Details how to perform operations manually via the system interface.
Describes the process of pumping down the vacuum chamber.
Explains how to set the gas flow rate for processing.
Details how to configure and use the timer function for plasma processes.
How to manually stop an ongoing plasma cleaning process.
Describes the procedure for venting the vacuum chamber.
Instructions on how to set up and manage cleaning recipes in the library.
Defines the intended applications and usage of the Tergeo plasma cleaner.
Lists critical safety precautions to follow before operating the plasma cleaner.
Details the electrical specifications, power requirements, and ratings for the equipment.
Specifies the recommended environmental conditions for operation, transportation, and storage.
Explains the fundamental principles of plasma.
Provides an overview of the Tergeo plasma system components and architecture.
Describes immersion/direct and remote/downstream plasma cleaning modes.
Explains the pulsed operation mode and its settings.
Details the integrated plasma emission intensity sensor and its readings.
Outlines the initial preparation steps for installing the plasma system.
Guides on preparing the vacuum pump for connection and operation.
Details the steps for setting up the plasma cleaner after unpacking and preparation.
Introduces the user to the physical components and layout of the plasma cleaner.
Provides a detailed step-by-step guide for assembling the plasma system.
Describes the process of pumping down the vacuum chamber.
Explains how to set the gas flow rate for processing.
Guides on setting up and adjusting the RF power supply for plasma generation.
Guides on loading recipes from the library to the main screen for execution.
Instructions on how to turn on the vacuum pump, especially if not controlled by the cleaner.
Details the steps for executing a selected recipe for plasma cleaning.
Explains how to execute a sequence of multiple recipes.
Guides on using the auto-tune feature for impedance matching.
Describes the post-cleaning procedures and system shutdown.
Provides tips for reducing pumping time and improving vacuum levels.
Offers methods to reduce the time required for venting the chamber.
Explains how to set appropriate gas flow rates for hydrogen gas.
Guides on creating weak oxygen plasma for specific biopolymer processing needs.
Provides methods to enhance gas purity for critical applications.
Details using the plasma sensor for end-point detection in oxygen plasma ashing.
Sets the maximum background pressure allowed before cleaning starts.
Sets the minimum background pressure for starting RF power immediately.
Configures whether plasma ignites before or after gas flow stabilization.
Defines the criteria for considering chamber pressure as stabilized.
Finds zero and maximum positions for the auto tuner motor.
Allows manual adjustment of the auto tuner motor position for impedance matching.
Selects the trigger event (RF ON or Plasma ON) for the countdown timer.
Options to disable, use normal, or use long range autotuner routines.
Reduces initial pumping speed by controlling orifice size for gentle sample handling.
Allows disabling the pressure sensor if it fails.
Enables or locks editing of gas name labels on the main screen.
Addresses issues with deteriorating vacuum levels and how to improve them.
Provides steps to troubleshoot failure of the touchscreen user interface to start.
Offers solutions for issues where the plasma fails to ignite.
Provides troubleshooting steps for failures in the auto impedance tuning process.
Addresses recipes getting stuck during the pumping down phase.
Troubleshoots issues where the gas flow rate cannot reach the set value.
Offers solutions for flow controllers oscillating around the set point.
Details procedures for checking leak rates in the gas delivery system.
Instructions for replacing a damaged quartz chamber.
Explains low oxygen plasma intensity and recipe setup for oxygen plasma.
Addresses why the sample chamber might appear bright when the remote plasma source is active.
Explains reasons for gradual changes in plasma intensity during cleaning.
How to trigger the timer when plasma is too weak for sensor detection.
Guides on cleaning and replacing the front cap o-ring for sealing.
Explains why plasma intensity readings might saturate.
Provides steps to take if the plasma intensity sensor fails.
Addresses issues where pressure readings remain at atmospheric level.
Explains how to operate the cleaner when the pressure sensor has failed.
Guides on replacing the pressure sensor, especially if the filament is burned out.
General| Ultrasonic Frequency | 42 kHz |
|---|---|
| Power | 35W |
| Tank Material | Stainless Steel |
| Tank Capacity | 600ml |
| Power Supply | AC |
| Voltage | 110V |
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