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Tergeo plasma cleaner operator’s manual
Revision: B3, Year 2020
Chapter 3 Table of contents
Operator’s Manual ........................................................................................................................................ 1
Tergeo plasma cleaner .................................................................................................................................. 1
Chapter 1 Legal notice: ................................................................................................................................. 2
Chapter 2 Safety compliance symbols used in this manual .......................................................................... 2
Chapter 3 Table of contents.......................................................................................................................... 3
Chapter 4 List of figures ................................................................................................................................ 6
Chapter 5 Operation safety........................................................................................................................... 7
5.1 Intended use of the equipment .......................................................................................................... 7
5.2 Safety precautions .............................................................................................................................. 7
5.3 Electrical ratings .................................................................................................................................. 8
5.4 Environmental conditions ................................................................................................................... 9
5.5 IEC 61010-1:2010 electrical safety conformity certificate ................................................................ 10
5.6 UL/CSA 61010-1 conformance certificate from TUV Rheinland. ...................................................... 11
5.7 UL Japan rf emission conformity certificate ..................................................................................... 12
Chapter 6 Introduction ............................................................................................................................... 13
6.1 Introduction to plasma ..................................................................................................................... 13
6.2 Introduction to system ................................................................................................................ 13
6.3 Immersion/direct cleaning and remote/downstream cleaning ....................................................... 14
6.4 Pulsed operation mode ..................................................................................................................... 15
6.5 Plasma sensor ................................................................................................................................... 16
Chapter 7 Installation .................................................................................................................................. 17
Step 1, preparation ................................................................................................................................. 17
Step 2, prepare the vacuum pump ......................................................................................................... 17
Step 3, set up the plasma cleaner ........................................................................................................... 19
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