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Tergeo-EM
PIE Tergeo-EM User Manual
46 pages
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1
Tergeo pl
asma cleaner operator’s manu
al
Revision
:
B3
, Year
2020
Oper
at
or’s Manual
Te
r
g
e
o
plasma cleaner
PIE SCIENTIFIC LLC
Address:
3209 Whipple Road
Union City, CA, 94587, U.S.A.
Tel: +1
-
51
0-
788
-
2439
.
Email: support@piesci
e
nti
fic.com
2
Table of Contents
default chapter
1
Operator's Manual
1
Tergeo Plasma Cleaner
1
Chapter 1 Legal Notice
2
Chapter 2 Safety Compliance Symbols Used in this Manual
2
Table of Contents
3
Chapter 3 Table of Contents
3
Chapter 4 List of Figures
6
Chapter 5 Operation Safety
7
Intended Use of the Equipment
7
Safety Precautions
7
Electrical Ratings
8
Environmental Conditions
9
IEC 61010-1:2010 Electrical Safety Conformity Certificate
10
UL/CSA 61010-1 Conformance Certificate from TUV Rheinland
11
UL Japan Rf Emission Conformity Certificate
12
Chapter 6 Introduction
13
Introduction to Plasma
13
Introduction to System
13
Immersion/Direct Cleaning and Remote/Downstream Cleaning
14
Pulsed Operation Mode
15
Plasma Sensor
16
Chapter 7 Installation
17
Step 1, Preparation
17
Step 2, Prepare the Vacuum Pump
17
Step 3, Set up the Plasma Cleaner
19
Getting Familiar with the System
19
Assembly Procedure
21
Getting Started
23
Chapter 8 Operation
25
General Guidance
25
Sequence of Operation
25
Understand the Main Screen Layout
26
Manual Operation
27
Pumping down the Chamber
27
Set the Gas Flow Rate
27
Set up the Timer
27
Change the Cleaning Mode
27
Set up the Rf Power Supply
27
Stop the Process Manually
28
Vent the Chamber
28
Set up Recipes in Recipe Library
28
Run a Cleaning Recipe
30
Load a Recipe to the Main Screen
30
Turn on the Vacuum Pump
30
Execute the Recipe
30
Execute a Job Sequence
32
Tune the Impedance
32
What to Do after Plasma Cleaning Finishes
32
How to Reduce the Pumping down Time and Achieve Better Vacuum Level
33
How to Reduce the Venting Time
34
How to Set the Right Gas Flow Rate for Hydrogen Gas
34
How to Create Extremely Weak Oxygen Plasma for some Critical Biopolymer Processing Applications
34
How to Improve the Gas Purity for some Critical Applications
35
How to Use Plasma Emission Sensor Reading as the End-Point Indicator for Oxygen Plasma Ashing Process
35
Process Uniformity in the Chamber
36
Chapter 9 System Settings
37
Chapter 10 Service and Troubleshooting
40
The Vacuum in the Chamber Gets Worse and Worse over Time. How to Improve the Vacuum Level
40
Fail to Start Touchscreen User Interface
40
Plasma Fails to Ignite
41
Auto Impedance Tuning Fails
41
Recipe Execution Stuck in the Pumping down State
42
Gas Flow Rate Can't Reaching the Set Value
42
Flow Controller Oscillate at the Set Point
42
How to Check the Leak Rate on the Gas Delivery System
42
Replace the Quartz Chamber
43
Why Pure Oxygen Plasma Emission Intensity Is so Low Compared with Argon and Nitrogen Plasma? How to Set up a Recipe for Oxygen Plasma
43
Why Sample Chamber May be Bright When Remote Plasma Source Is Activated
43
Why Plasma Intensity Gradually Increase or Decrease During Cleaning
43
If the Plasma Is too Weak to be Detected by the Plasma Sensor (Value Is below 2), How to Let the Timer Start Counting down and Run a Recipe
44
Clean and Replace the Front Cap O-Ring
44
Why the Plasma Intensity Value Doesn't Change When It Reaches a Value of 800 or 1000
45
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PIE Tergeo-EM Specifications
General
Ultrasonic Frequency
42 kHz
Power
35W
Tank Material
Stainless Steel
Tank Capacity
600ml
Power Supply
AC
Voltage
110V
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