The ELPHY Quantum and ELPHY Plus are attachment systems designed for nanolithography and semiconductor navigation, primarily used with Scanning Electron Microscopes (SEM) and Focused Ion Beam (FIB) systems. These systems enable precise control over electron or ion beams for patterning at the nanoscale.
Function Description:
The core function of both the ELPHY Quantum and ELPHY Plus is to provide advanced nanolithography capabilities by controlling the electron or ion beam of an SEM/FIB system. They generate precise patterns, allowing users to create structures with high resolution. The systems act as an interface between a computer and the SEM/FIB, translating digital designs into physical beam movements.
The ELPHY Quantum is a full-length PCI multi-layer card that integrates directly into a PC. It provides essential interfaces for controlling the SEM/FIB beam, including X and Y DAC scan outputs for beam deflection, a TTL level beam blank control signal output, a video input from the SEM for imaging, and a TTL level SEM external control switching signal. It also includes an I/O port for Raith's internal use. The input and output levels are factory-set to match the user's specific SEM.
The ELPHY Plus is a more comprehensive 19-inch rack-based system designed to reduce electronic noise, offering enhanced stability and performance. In addition to the interfaces provided by the ELPHY Quantum, the ELPHY Plus includes a SCSI interface to the PC, X and Y beam shift inputs, and a video out (BAS out) to a monitor. It also features additional manual controls and visual indicators on its front and rear panels. These include switches for inverting SEM external control and beam blank control signals, a toggle switch to reset the hardware, two LED bar displays to indicate beam position, and LEDs to indicate beam blank and SEM external control signals, as well as a power button and indicator.
Both systems support custom engineering, allowing the equipment to be tailored to specific user requirements. They are designed for full-service, independent repair, with experienced engineers and technicians available for support.
Important Technical Specifications:
- ELPHY Quantum:
- PCI multi-layer card, requiring one PCI slot and two access slots at the rear of the PC.
- Interfaces: X DAC scan output, Y DAC scan output, TTL level beam blank control signal output, Video input from SEM, TTL level SEM external control switching signal, I/O port.
- Input/output levels are factory-set to match the SEM.
- ELPHY Plus:
- 19-inch rack-based system for electronic noise reduction.
- Interfaces (in addition to Quantum): SCSI interface to PC, X Y beam shift inputs, Video out to monitor (BAS out).
- Manual controls and indicators: Switches for signal inversion, hardware reset toggle, LED bar displays for beam position, LEDs for beam blank and SEM external control, power button.
- Beam Blanker Control Unit:
- High voltage power supply and control electronics.
- Accepts TTL signal from ELPHY Quantum or ELPHY Plus.
- Typical high voltage output: 200 volts.
- Zeiss FEG SEM systems may use a 19-inch rack system with 8kV input and output.
- Picoammeter (Optional):
- Portable battery-powered meter or high-end Keithley meter.
- BNC cable for connection to SEM absorbed current output.
- Keithley meters may include a GPIB interface board in the PC.
- Motorized Stage Control (Optional):
- Control via RS-232, TCP/IP, or GPIB.
- Compatible with retro-fitted motors and control units (e.g., from Deben).
- Connectivity:
- X Y DAC output to SEM external scan interface.
- Video input from SEM detector (usually SEI signal).
- Optional: Control to switch SEM to external scan mode, TTL signal to beam blanker electronics, RS-232 for SEM computer control, TCP/IP for SEM computer control, RS-232 for Stage control.
- ELPHY Plus requires a SCSI terminator if no other devices are on the SCSI chain.
Usage Features:
- Pattern Generation: Enables precise patterning at the nanoscale by controlling the SEM/FIB beam.
- Beam Blanking: Utilizes an electronic beam blanker control unit and hardware to deflect the electron beam, preventing it from reaching the sample surface when not desired. This is crucial for precise exposure control during lithography.
- Universal Sample Holder: A convenient accessory for mounting small chip-size samples. It features a simple clamping system, space for multiple samples and calibration samples (e.g., Chessy), and an inbuilt Faraday cup for measuring total beam current at the specimen surface.
- Picoammeter Integration: Allows for accurate measurement of absorbed current, which is vital for process control and dose calibration in lithography.
- Motorized Stage Control: Facilitates automated sample positioning and movement, enhancing throughput and precision for complex patterning tasks.
- External Control: Provides various options for external control of the SEM, including switching to external scan mode and computer control via RS-232 or TCP/IP.
- EDX Option Compatibility: Systems can be integrated with existing EDX (Energy Dispersive X-ray Spectroscopy) options, often through a switch box that toggles between the ELPHY system's X Y output and the EDX system's X Y output, and can also switch video signals.
- Comprehensive Documentation: Users are encouraged to read the operation manual thoroughly for correct system usage, safety procedures, and understanding startup, standby, shutdown, and bakeout procedures.
Maintenance Features:
- Independent Repair Center: Artisan Technology Group operates a full-service, independent repair center with experienced engineers and technicians, ensuring reliable maintenance and support for the equipment.
- Spare Parts and Services: The company offers critical and expedited services, in-stock/ready-to-ship components, and ITAR-certified secure asset solutions.
- Equipment Buyback and Trade-ins: Artisan Technology Group buys excess, underutilized, and idle equipment, offering credit for buybacks and trade-ins, which can be beneficial for upgrading or managing surplus assets.
- Power Supply Considerations: All systems are supplied with a power distribution board. It is recommended to plug the PC, monitor, ELPHY Plus, Beam Blanker Electronics, Stage controller, and Picoammeter into this board. The power for the board should be taken from the same line supply as the SEM to ensure a common earth ground, preventing ground loops. Users are advised to check line power supply voltage before connecting and switching on.
- Cable Management: Cables should be kept tidy and routed away from mains or heavy current-carrying cables to minimize interference.
- Electronic Equipment Placement: If a Keithley Picoammeter is supplied, it should be positioned away from the SEM column to prevent potential interference with the SEM.
- SCSI Terminator: For the ELPHY Plus, a SCSI terminator must be installed if no other devices are connected to the SCSI chain, ensuring proper SCSI bus operation.
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