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Stanford Research Systems RGA200 User Manual

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362 pages
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Revision 1.8 (May, 2009)
Operating Manual and
Programming Reference
Models RGA100,
RGA200, and RGA300
Residual Gas Analyzer
1290-D Reamwood Ave.
Sunnyvale, CA 94089
408-744-9040 · 408-744-9049 fax
info@thinkSRS.com · www.thinkSRS.com

Table of Contents

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Stanford Research Systems RGA200 Specifications

General IconGeneral
Mass Range1 to 200 amu
Detector TypeFaraday cup and electron multiplier
Operating Temperature0 to 50 °C
Maximum Total Pressure10⁻⁴ Torr
Data OutputRS-232
Power Supply50/60 Hz
Scan Speed0.1 to 10 amu/sec
Operating Pressure Range10⁻¹⁰ to 10⁻⁴ Torr
Ion SourceOpen Ion Source
Emission Current0-2 mA adjustable

Summary

Safety and Preparation for Use

General Safety Warnings

Covers warnings, precautions, electrical hazards, and handling guidelines for the instrument.

Line Cord Safety

Details on the proper use and connection of the power cord to prevent electrical shock.

Service Precautions

Guidelines for safe servicing, including the presence of another person and avoiding unauthorized modifications.

Chapter 1 Getting Started

Unpacking

Procedures and checks for safely unpacking the RGA system components.

Installation

Covers probe, ECU, and software installation, including hardware requirements.

Turning on the RGA

Steps for powering up the RGA Head and verifying readiness for communication.

Running the SRS RGA System

Guide to launching the RGA software and starting data acquisition.

Chapter 2 RGA General Operation

Chapter 3 RGA Quadrupole Probe

Ionizer

Description and principle of operation of the ionizer component.

Quadrupole mass filter

Explanation of the mass filter's design, operation, and characteristics.

Ion Detector

Details on Faraday Cup and Electron Multiplier detectors.

Hardware modifications

Discussion of modifications to the ionizer and probe for specialized applications.

Chapter 4 RGA Electronics Control Unit

Front Panel

Description of the ECU's front panel layout and connectors.

Rear Panel

Details on the ECU's rear panel connectors, LEDs, and cooling fan.

Electrometer

Explanation of the electrometer's function, detection limits, and calibration.

Maintenance and Service

Information on the ECU's lack of serviceable parts and authorized service.

Chapter 5 RGA Windows Software

System Requirements

Details the minimum PC hardware and software needed for RGA Windows operation.

Getting Started

Guides on launching the RGA software, connecting to the Head, and shutdown.

Features and Operation

Explains the RGA window, multiple head operation, and various display modes.

Head Calibration and Security

Procedures for tuning sensitivity, adjusting CEM gain, peak tuning, and securing the head.

Chapter 6 Programming the RGA Head

Command Syntax

Details the structure and valid parameters for RGA commands.

Communication Errors

Lists and explains common communication errors and their reporting.

Troubleshooting the RGA communications

Methods for diagnosing and resolving communication interface issues.

Programming the RGA Head

Describes basic programming steps for configuration, operation, and diagnosis.

RGA Command Set

Lists and describes all available commands based on their functions.

Chapter 7 RGA Tuning

Peak Tuning Procedure

Guides for calibrating the mass scale and resolution (peak width).

Sensitivity Tuning Procedure

Procedure for determining partial and total pressure sensitivity factors.

Electron Multiplier Tuning Procedure

Method for calibrating the electron multiplier gain.

Chapter 8 RGA Maintenance

Chapter 9 RGA Troubleshooting

Chapter 11 RGA Probe Assembly

Appendix A Vacuum Diagnosis with SRS RGA’s

Appendix B Using SRS RGA’s to Sample High Pressure Gasses

Appendix C Do I need a PPM100 Partial Pressure Monitor for my SRS RGA?

Appendix D SRS RGA LabVIEW Development Kit

Declaration of Contamination of Vacuum Equipment

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