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Stanford Research Systems RGA300 User Manual

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362 pages
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Revision 1.8 (May, 2009)
Operating Manual and
Programming Reference
Models RGA100,
RGA200, and RGA300
Residual Gas Analyzer
1290-D Reamwood Ave.
Sunnyvale, CA 94089
408-744-9040 · 408-744-9049 fax
info@thinkSRS.com · www.thinkSRS.com

Table of Contents

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Stanford Research Systems RGA300 Specifications

General IconGeneral
BrandStanford Research Systems
ModelRGA300
CategoryMeasuring Instruments
LanguageEnglish

Summary

Chapter 1 Getting Started

Unpacking

Procedures for safely removing the RGA from its packaging and preparing for installation.

Installation

Detailed steps for installing the RGA probe and ECU onto a vacuum system.

Chapter 2 RGA General Operation

Chapter 3 RGA Quadrupole Probe

Chapter 4 RGA Electronics Control Unit

Chapter 5 RGA Windows Software

Head Calibration and Security

Procedures for tuning RGA sensitivity, adjusting CEM gain, and securing head parameters.

Chapter 6 Programming the RGA Head

Communication Errors

Identification and handling of various communication errors encountered during programming.

Chapter 7 RGA Tuning

Peak Tuning Procedure

Procedures for calibrating the mass scale and resolution of the RGA head.

Sensitivity Tuning Procedure

Method for determining and setting partial and total pressure sensitivity factors.

Chapter 8 RGA Maintenance

Warnings!

Critical safety warnings and precautions for servicing the RGA.

Chapter 9 RGA Troubleshooting

Internal Error Detection in the SRS RGA

Methods for detecting and diagnosing internal errors using LEDs and query commands.

Basic Troubleshooting

List of common error codes, their causes, and troubleshooting steps.

Chapter 10 RGA Circuit Description

Appendix B Using SRS RGA’s to Sample High Pressure Gasses

Appendix C Do I need a PPM100 Partial Pressure Monitor for my SRS RGA?

Appendix D SRS RGA LabVIEW Development Kit

Important!

Critical notes regarding the SRS RGA LabVIEW Development Kit drivers and support.

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