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Stanford Research Systems RGA100 User Manual

Stanford Research Systems RGA100
362 pages
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Revision 1.8 (May, 2009)
Operating Manual and
Programming Reference
Models RGA100,
RGA200, and RGA300
Residual Gas Analyzer
1290-D Reamwood Ave.
Sunnyvale, CA 94089
408-744-9040 · 408-744-9049 fax
info@thinkSRS.com · www.thinkSRS.com

Table of Contents

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Stanford Research Systems RGA100 Specifications

General IconGeneral
Mass Range1 to 100 amu
Maximum Operating Pressure1 x 10^-4 Torr
DetectorFaraday cup and electron multiplier
Computer InterfaceRS-232
Analog Output0-10 V
Digital InterfaceRS-232
Resolution0.5 amu
FilamentTungsten
Minimum Detectable Partial Pressure10^-12 Torr
Ionization Energy70 eV
Electron Emission Current1 mA
Power Requirements100-240 VAC
Dimensions19" rack mount, 3U
Operating Temperature0 to 50 °C
Weight30 lbs (13.6 kg)

Summary

Chapter 1 Getting Started

Unpacking

Details the process of removing the RGA probe and ECU from packaging.

Installation

Covers hardware requirements and procedures for installing the RGA probe and ECU.

Turning on the RGA

Explains the procedure for powering up the RGA Head and ECU.

Running the SRS RGA System

Guides the user through launching the RGA Windows program and acquiring data.

Chapter 2 RGA General Operation

What is an RGA?

Defines a Residual Gas Analyzer and its basic principles of operation.

The SRS RGA

Describes the components of the SRS RGA system: probe and ECU.

Basic Operating Modes of the SRS RGA

Explains analog scanning, histogram scanning, single gas monitoring, and total pressure measurement.

Residual Gas Analysis Basics

Introduces concepts of spectral analysis and interpreting mass spectra.

Chapter 3 RGA Quadrupole Probe

Ionizer

Details the ionizer's design, principle of operation, and parameter settings.

Quadrupole mass filter

Explains the design, principle of operation, and mass range/resolution of the filter.

Ion Detector

Describes Faraday Cup and Electron Multiplier detector operation and characteristics.

Hardware modifications

Discusses modifications to the ionizer for alternative measurement applications.

Chapter 4 RGA Electronics Control Unit

Front Panel

Describes the components and layout of the ECU's front panel.

Rear Panel

Details the connectors, fan, and LEDs on the ECU's rear panel.

LED Functionality

Explains the status and error indications provided by the ECU's LEDs.

Electrometer

Describes the electrometer's function, detection limits, and calibration.

Maintenance and Service

Provides guidelines for maintaining and servicing the RGA ECU.

Chapter 5 RGA Windows Software

Getting Started

Guides on launching the RGA software, connecting to the RGA Head, and shutting down.

Features and Operation

Covers RGA window management, multiple head operation, and display modes.

General Utilities

Explains data cursors, scheduled saving, and browsing the gas library.

Head Calibration and Security

Details procedures for tuning sensitivity, adjusting CEM gain, and securing the RGA Head.

Chapter 6 Programming the RGA Head

Command Syntax

Explains the structure and valid parameters for RGA commands.

Communication Errors

Lists and describes common communication errors and their reporting.

Troubleshooting the RGA communications

Provides methods for diagnosing and resolving communication issues.

RGA Command Set

Provides a comprehensive list and description of all RGA commands.

Chapter 7 RGA Tuning

Peak Tuning Procedure

Details procedures for calibrating mass scale and resolution using known gases.

Sensitivity Tuning Procedure

Explains how to determine and set partial and total pressure sensitivity factors.

Electron Multiplier Tuning Procedure

Describes how to calibrate the electron multiplier gain.

Chapter 8 RGA Maintenance

Warnings!

Provides critical safety warnings for service personnel.

Probe Bakeout

Details the process and importance of baking out the RGA probe.

Ionizer Replacement

Provides step-by-step instructions for replacing the ionizer components.

Filament Replacement

Guides the user through the procedure for replacing the filament.

CDEM Handling and Care

Provides recommendations for handling and caring for the CDEM detector.

Quadrupole filter cleaning

Explains how to clean the quadrupole rods to maintain performance.

Chapter 9 RGA Troubleshooting

Internal Error Detection in the SRS RGA

Describes firmware checks and how to detect internal errors.

Basic Troubleshooting

Lists error codes, causes, and troubleshooting steps for common issues.

Built-in Hardware Checks

Details the automatic hardware checks performed by the RGA Head.

Chapter 10 RGA Circuit Description

Overview of the RGA

Provides a general overview of the RGA system components and operation.

Circuit Description

Details the electrical characteristics and circuits of the RGA.

Description of Schematics

Breaks down the RGA's electronic schematics by component.

Chapter 11 RGA Probe Assembly

RGA Probe Assembly Schematic

Provides a schematic drawing of the RGA probe assembly.

Feedthru Flange Connectors Schematic

Shows the layout of connectors on the feedthru flange.

Appendix A Vacuum Diagnosis with SRS RGA’s

Composition Analysis

Explains how to analyze vacuum system composition using mass spectra.

Leak Testing

Details using the RGA as a leak detector for vacuum systems.

Appendix B Using SRS RGA’s to Sample High Pressure Gasses

Vacuum Process Sampling (10 to 10-5 mbar)

Describes designing pressure reduction systems for RGA sampling.

High Pressure Sampling (>100mbar)

Explains using capillary inlets with bypass pumping for high-pressure sampling.

Appendix C Do I need a PPM100 Partial Pressure Monitor for my SRS RGA?

What does the PPM100 controller do?

Details the capabilities of the PPM100 controller, including monitoring and control.

PPM100 Specifications

Lists the technical specifications for the PPM100 Partial Pressure Monitor.

Appendix D SRS RGA LabVIEW Development Kit

Using SRS RGA LabVIEW

Guides on connecting and using the SRS RGA with LabVIEW.

Ionizer Setup Dialog

Describes how to configure ionizer parameters via LabVIEW.

Detector Setup Dialog

Explains how to configure detector parameters via LabVIEW.

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