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| Model | 6DS-SP |
|---|---|
| Manufacturer | Strasbaugh |
| Category | Industrial Equipment |
| Number of Spindles | 6 |
| Polishing Heads | 6 |
| Applications | Semiconductor wafer polishing |
| Type | Wafer Polisher |
| Polishing Method | Chemical Mechanical Polishing (CMP) |
| Control System | Programmable Logic Controller (PLC) |