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nTellect 7AF
Strasbaugh nTellect 7AF User Manual
2493 pages
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n
Tellect

(Model 7AF)
Wafer Grinder
Operations and
Maintenance Manual
S T R A S B A U G H
825 Buckley Road
San Luis Obispo, California 93401
Phone
(805) 541
-
6424
Fax:
(805) 541
-
6425
2
Table of Contents
List of Figures
18
Table of Contents
18
Figure 2-1 Top View of Wafer Handling Section with References to Procedure Steps
55
Figure 3-13 Dress Cycle Menu
68
Figure 3-14 Machine Maintenance Menu
68
Figure 3-8 Main Menu
68
Figure 3-9 Home Machine Menu
68
Figure 3-1 Model 7AF Wafer Grinder - Front View
73
Figure 3-2 Left Side View
75
Figure 3-3 Right Side View
77
Figure 3-4 Rear View
79
Figure 3-5 Wafer Grinder Subassemblies
81
Figure 3-6 Control Panel
84
Figure 3-12 Wheel and Chuck Recipes Menu
93
Figure 8-2 Main Menu
139
Figure 8-3 Home Machine Menu
141
Figure 8-4 Grind Cycle Menu
147
Figure 8-5 Dress Cycle Menu
151
Figure 8-6 Main Menu at Power up
160
Figure 8-10 Example of a Fine Grind Recipe
177
Figure 8-11 Dress Cycle Menu
185
Figure 9-1 Wafer Recipes Menu
218
Figure 9-2 Wheel and Chuck Recipes Menu
232
Figure 11-1 Lower Spindle Side to Side Adjustment
281
Figure 11-2 Lower Spindle Front to Rear Adjustment
283
Figure 11-4 Upper Spindle Probe Reading Points
296
Figure 11-5 Upper Spindle Side to Side Adjustment
297
Figure 11-6 Upper Spindle Front to Rear Adjustment
298
Figure 12-1 Machine Maintenance Menu
418
Figure 12-3 Machine Setup Entry Menu
443
Figure 12-4 Top View of Robot Theta Positioning at Cassette Turret
455
Figure 12-5 Top View of Radial Positioning of Robot
456
Figure 12-6 Top View of Z-Axis Positioning of Robot
457
Figure 14-1 Wafer Surface Finish Examples
524
Figure 15-1 Grind Data Transfer to Diskette
556
Section 2
1964
Default Chapter
2004
Connecting to an Adapter Card
2004
Setting AC28 Jumpers
2004
AC28 Acknowledgment Data
2005
Connecting Field Wiring
2006
Wiring Digital Modules
2006
Wiring Quad Pak Modules
2009
Wiring Analog Modules
2011
Chapter 3: Programming with the Pamux Driver
2019
Overview
2019
What Is the Pamux Driver
2019
Using the Pamux Driver under DOS
2020
Installation
2020
Pamux Driver Parameters
2020
Using the Pamux Driver with Interpreted BASIC or Qbasic
2021
Pamux Error Codes
2023
Working with Banks
2023
Command Reference
2024
Using the Pamux Driver under Windows
2048
Installation
2048
Architecture
2048
Pamux Apis
2049
API Command Reference
2050
AC28 Operations
2050
Digital Bank Operations
2052
Digital Point Operations
2054
Digital "Fast" Operations
2055
Analog Bank Operations
2056
Analog Point Operations
2057
Analog Watchdog Operations
2058
Analog Status Operations
2058
Pamux Utility Operations
2059
Status/Error Codes
2061
Chapter 4: Programming Without the Pamux Driver
2063
Overview
2063
Bus Pin Definitions - Not Using AC28
2063
Bus Timing
2064
Write Timing
2064
Read Timing
2064
Direct Programming of Pamux Stations with Ac28
2065
Variables Used in Examples
2065
Utility Subroutines Used in Examples
2066
TURN off Reset
2067
Resetting the System
2067
Reading from and Writing to Digital Pamux Stations
2068
Reading Digital Inputs
2068
Writing Digital Outputs
2068
Reading from and Writing to Analog Pamux Stations
2069
Pamux Internal Registers
2069
Gaining and Releasing Access
2071
Reading an Analog Channel
2072
Configuring and Writing to Analog Channels
2073
Watchdog Registers
2076
Status Register
2077
Performing Diagnostics
2078
Common Subroutines
2080
Appendix A: Troubleshooting and Tips
2081
Overview
2081
Preliminary Procedures
2081
General Troubleshooting
2082
Notes on Leds
2082
Useful Tips
2083
Appendix B: Specifications
2085
Pamux Product Specifications
2085
AC28 Adapter Card
2085
AC36 Adapter Card
2085
B4 Brain Board
2086
B5 Brain Board
2086
B6 Brain Board
2087
TERM1 Terminator Board
2087
TERM2 Terminator Board
2087
UCA4 Universal Communication Adapter
2087
Pamux-Compatible I/O Mounting Racks
2088
Pamux-Compatible ANALOG I/O Modules
2088
Pamux Compatible Digital I/O Modules
2090
Cables and Connectors
2090
Cables
2090
Pamux Cabling and Termination
2092
Connectors
2092
Power Supplies
2093
Appendix C: Temperature Conversion Routines
2095
Overview
2095
Algorithms
2096
Ad4
2096
Ad5, Ad5T
2096
Ad8, Ad8T
2097
Ad10T2
2097
Ad17T
2098
Appendix D: Product Support
2101
Appendix E: Glossary
2103
Index
2109
Section 3
2121
Default Chapter
2123
Introduction
2123
Welcome to the G4 Digital I/O Family Data Book
2123
What's in this Book
2123
For Help
2124
Generation 4 Digital I/O Mounting Racks
2125
Overview of Mounting Racks
2125
G4PB4 Mounting Rack
2127
G4PB4R Mounting Rack
2128
G4PB8 Mounting Rack
2129
G4PB8H Mounting Rack
2130
G4PB16 Mounting Rack
2132
G4PB16H Mounting Rack
2134
G4PB16HC Mounting Rack
2136
G4PB16I Mounting Rack
2138
G4PB16T Mounting Rack
2141
G4PB24 Mounting Rack
2143
G4PB32DEC Mounting Rack
2145
Generation 4 Racks with Integral Digital I/O
2149
Overview of Racks with Integral I/O
2149
G4PB16J and K Racks with Integral Inputs
2150
G4PB16L Rack with Integral Outputs
2152
Generation 4 Digital I/O Modules
2155
Overview of All Modules
2155
Digital DC Input Modules
2157
Digital AC Input Modules
2159
Digital Input Test Module
2162
Digital DC Output Modules
2163
Digital AC Output Modules
2165
Dry Contact Output Modules
2169
Digital Output Test Module
2171
Generation 4 Digital I/O Accessories
2173
Overview of Accessories
2173
PC to I/O Mounting Rack Adapter Card (G4AC5)
2173
Cables and Connectors
2175
Fuses
2176
Jumper Strap
2176
Appendix A: Designing Custom I/O Mounting Racks
2177
Introduction
2177
Dimensions
2177
Printed Circuit Patterns
2178
Parts List
2178
Appendix B: Wiring Diagrams
2179
Input Modules Using DC Field Voltages
2179
Input Modules Using AC Field Voltages
2180
Output Modules Using DC Field Voltages
2181
Ouput Modules Using AC Field Voltages
2182
Section 4
2194
Overview
2196
Pre-Aligner Axes
2196
Pin Loading and Chuck Loading
2197
Wafer Sizes
2197
Fast Align Option
2198
Summary of Equipe Pre-Aligners
2198
Controlling the Pre-Aligner
2199
Aligning a Wafer
2200
CE Mark
2202
EMC and ESD Protection
2202
Regulatory Compliance
2202
Cable Connectors
2203
Safety Features
2203
High Voltage Label
2204
Manufacturing Label
2204
Safety Labels
2204
Electrical
2206
Environmental
2206
Facilities Requirements
2206
Mechanical
2206
Vacuum
2207
Installing a Pre-Aligner
2208
Unpacking
2208
Mechanical Setup and Leveling
2209
Connecting the Pre-Aligner to the Controller
2210
Accessing a User Interface
2212
Connecting the Vacuum Line
2212
Connecting the Teach Pendant
2213
Installing the EQT 32 Interface
2214
Preliminary Teaching
2215
Verifying Connections
2215
Operating a Pre-Aligner
2216
Pre-Aligner Files
2216
Pre-Aligner Parameter File
2216
Wafer Parameter File
2217
Wafer Calibration File
2219
Copying Files from the Diskette
2220
Verifying Correct Files
2220
Commands
2221
Pre-Aligner Macros
2222
Macro for Aligning
2223
Robot Macro for Fast Align Option
2225
Loading Position
2227
Using the Macros to Verify Positions
2227
Chuck Position
2228
Unloading or up Position
2228
Using the Fast Align Option
2229
Maintenance
2230
Maintenance and Diagnostics
2230
Running Diagnostic Tests
2231
Starting Diagnostics
2232
Galil & I/O Test
2233
NVSRAM Test
2233
Encoder Read Test
2235
Limit & Home Test
2235
Servo Test
2236
Home Test and Set
2238
R & Z Home Offset
2239
Scaling Factor Test
2241
Vacuum Valve Sensor
2242
CCD and Chuck Test
2244
Pre-Aligner I/Os (for Integrated Systems Only)
2244
Troubleshooting
2246
Checking Pre-Aligner Status
2247
Cause and Recovery for STAT Messages
2248
Checking Alignment Status with the ALST Command
2249
Checking Limit Switch Status with the RLS Command
2250
Using the GLST Command
2252
Glossary of Acronyms, Abbreviations, and Terms
2254
Section 5
2262
Default Chapter
2267
Overview of Atmospheric Robots
2267
Flat Panel Display
2268
Wafer Handlers
2268
Top Mount and Bottom Mount
2269
Wetbots
2269
Dual-Arm Robot
2270
End Effectors
2271
Laser Scanner
2271
Robot Accessories
2271
Robotic Systems
2272
Wafer Pre-Aligner
2272
Equipe Smart Controller
2273
Front-End System
2274
Track
2274
User Interfaces
2275
CE Mark
2277
EMC and ESD Protection
2277
Regulatory Compliance
2277
Emergency Stop (EMS/MOFF)
2278
Laser Radiation
2278
Safety
2278
Safety Interlock
2279
Additional Robot Safeguards
2280
Lockout/Tagout
2281
Electrical Connections
2282
Robot Cables
2283
Safety Labels
2283
High Voltage Label
2285
Pinch Point Label for S2-93A Systems
2285
Fuse Label
2286
Manufacturing Labels
2286
Underwriter Lab Label
2286
SEMI S2-93A Systems
2287
Center of Gravity
2288
Teach Pendant
2289
Equipe Smart Controller
2291
Printed Circuit Boards
2291
System Description
2291
Hardware Connections
2294
Macros
2295
Software
2295
Coordinate File
2296
Moving and Homing a Robot Axis
2296
Robot Parameter File
2296
Electrical
2299
Environmental
2299
Facilities Requirements
2299
Installing the Robot
2301
Unpacking
2301
Mechanical Setup
2302
Moving the Robot or Robotic System
2302
Attaching the Robot to the Frame
2304
Leveling
2304
Connecting the Robot and Controller
2306
Accessing a User Interface
2308
Connecting the Teach Pendant
2308
Installing the EQT 32 Interface
2310
Verifying Connections
2311
Adjusting the Vacuum Sensor
2312
Safety Verification
2313
Verifying Vacuum Sensor Connections
2313
Robot Axis and Station Naming Conventions
2315
Teaching and Operating
2315
Commands and Macros for Robots
2316
Coordinate File
2316
Teaching Stations
2318
Setting the Optional Z-Axis Brake
2319
Teaching a Robot Only
2320
Teaching a Robot and Pre-Aligner
2321
Scanner Mapping
2323
Teaching the Scanner Mapping
2324
Teaching the Scanner in Special Situations
2326
Robot Parameter File
2327
Adjusting Robot Parameters
2328
Accessing Galil Mode
2329
Applying Tension to the Spring
2329
Finding the Home Switch
2329
Flipper End Effector
2329
Defining the 180-Degree Flip
2330
Saving the Positions
2331
Testing the Flipper
2331
Maintenance and Diagnostics
2333
Shipping and Storage
2333
Diagnostics for the Robot
2334
NVS-Ram Test
2335
Using EQT to Run Diagnostics
2335
Galil and I/O Test
2336
Encoder Read Test
2338
Limit and Home Test
2338
Servo Test
2339
Home Test and Set
2340
R-Home Test and Set
2341
Scaling Factor Test
2342
Vacuum Valve and Vacuum Sensor Test
2342
Scanning Test
2343
STEP #1 (NVSRAM Test)
2344
Using the Teach Pendant to Run Diagnostics
2344
Step #2 (Galil & I/O Test)
2345
Step #3 (Encoder Read Test)
2348
Step #4 (Limit & Home Test)
2348
Step #5 (Amp. Board Setup)
2349
Step #6 (Amp. Module Setup)
2349
Step #7 (Servo Test)
2349
Step #8 (Home Test & Set)
2350
Step #9 (R-Home Test & Set)
2351
Step #10 (Scaling Factor Test)
2354
Step #11 (Vac. Valve/Sensor)
2355
Step #12 (Robot I/O's)
2355
Step #13 (Scanning)
2356
Common Problems
2357
Troubleshooting
2357
Frequently Asked Questions
2358
Checking Robot Status
2360
Cause and Recovery for STAT Messages
2361
Checking NVSRAM with RNCS Command
2363
Checking Limit Switch Status with the RLS Command
2364
Using the GLST Command
2367
Problem Causes and Suggested Actions
2368
Aftermath Analysis
2372
Appendix A: Approved Laser Scanners
2373
Appendix B: Circuit Drawings
2375
Glossary of Acronyms, Abbreviations, and Terms
2379
Section 6
2388
Overview of Vacuum Robots
2390
End Effectors
2391
Equipe Smart Controller
2391
Home and Limit Switches
2391
User Interfaces
2392
Hardware Connections
2394
Coordinate File
2395
Macros
2395
Robot Parameter File
2395
Software Control
2395
Moving and Homing a Robot Axis
2396
Electrical
2398
Environmental
2398
Facilities Requirements
2398
Mechanical
2398
Installing the Robot
2400
Unpacking
2400
Moving or Hoisting the Robot
2401
Connecting the Robot and Controller
2402
Installing the Controller and Pre-Aligner
2402
Accessing a User Interface
2404
Connecting the Teach Pendant
2405
Installing the EQT 32 Interface
2405
Verifying Connections
2407
Attaching the Arm to a VAC514 Robot
2408
Attaching the End Effector to the Robot Arm
2410
Leveling the Robot System
2411
Safety Verification
2411
Robot Axis and Station Naming Conventions
2412
Teaching and Operating
2412
Commands and Macros for Robots
2413
Coordinate File
2413
Setting the Z-Axis Brake
2416
Teaching a Robot Only
2417
Teaching Stations
2417
Teaching a Robot and an Indexer
2419
Adjusting the VAC400 Radial Arm
2421
Robot Parameter File
2423
Adjusting Robot Parameters
2424
Maintenance and Diagnostics
2426
Shipping and Storage
2426
Diagnostics for the Robot
2427
NVS-Ram Test
2428
Using EQT to Run Diagnostics
2428
Galil and I/O Test
2429
Encoder Read Test
2431
Limit and Home Test
2431
Servo Test
2432
Home Test and Set
2433
R-Home Test and Set
2434
Scaling Factor Test
2435
STEP #1 (NVSRAM Test)
2436
Using the Teach Pendant to Run Diagnostics
2436
Step #2 (Galil & I/O Test)
2437
Step #3 (Encoder Read Test)
2440
Step #4 (Limit & Home Test)
2440
Step #5 (Amp. Board Setup)
2441
Step #6 (Amp. Module Setup)
2441
Step #7 (Servo Test)
2441
Step #8 (Home Test & Set)
2442
Step #9 (R-Home Test & Set)
2443
Step #10 (Scaling Factor Test)
2444
Step #12 (Robot I/O's)
2444
Common Problems
2446
Troubleshooting
2446
Frequently Asked Questions
2447
Checking Robot Status
2450
Cause and Recovery for STAT Messages
2451
Checking NVSRAM with RNCS Command
2452
Checking Limit Switch Status with the RLS Command
2453
Using the GLST Command
2456
Problem Causes and Suggested Actions
2457
Aftermath Analysis
2460
Glossary of Acronyms, Abbreviations, and Terms
2462
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Strasbaugh nTellect 7AF Specifications
General
Brand
Strasbaugh
Model
nTellect 7AF
Category
Industrial Equipment
Language
English
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