Atmospheric Single-Arm Robot Manual
4000-0016 Rev A
52
Teaching Stations
Review the following figure and definitions before teaching stations.
To GET a wafer from a slot or to PUT a wafer in a slot, the movement of
the end effector requires space above and below the final position of the
wafer. When you teach a station, you are prompted for the stroke and
offset parameters.
Taught Position of the Wafer sets the positions of the Theta and Radial
axes such that the end effector is at the center of the wafer. The position
of the Z axis is the basis for the Offset and Stroke values.
Offset sets the limit on Z travel above the taught position. This distance is
required for placing a wafer in a slot or removing a wafer without
touching the side of the cassette.
Stroke sets the limit on Z travel below the taught position for a given
Offset.
Together, the Offset and Stroke provide sufficient Z travel within the
cassette for GET and PUT movements without the wafer touching any part
of the cassette. For example, if the taught position is 100, the offset is 35,
and the stroke is 75, then the upper Z-travel limit is 135 (taught position +
offset) and the lower Z-travel limit is 60 (taught position + offset - stroke).
slot
Taught position
of the wafer
offset
stroke
Positions used by
the end effector to
get or put a wafer
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