Vacuum Robot Manual
4000-0315 Rev 1
6
Software Control
The Equipe Smart Controller contains firmware on EPROMs and editable
files (macro, coordinate, parameter, and optional pre-aligner and/or
indexer files) on NVSRAM. Your robot is delivered with the files stored
in NVSRAM on the controller; backup files are supplied on a diskette.
The software stored on the EPROMs contains the basic commands and
logic for interpreting commands or macros sent from the Teach Pendant or
EQT 32. A macro is a set of commands that perform an operation on the
system. The firmware interprets and executes the macros. You can edit a
macro, but you cannot edit the firmware.
Macros
A macro can be written to home the robot, align a wafer, get a wafer from
a station, or put that wafer in a loadlock. In addition to the macros that
Equipe writes for you, you can write macros using the Equipe macro
language and commands. Refer to the Equipe Software and Controller
Manual for instructions on writing macros.
A GET or PUT macro can initiate the movement to any Process Module
(PM) station and loadlock, because the coordinates for stations are defined
and stored in the coordinate file. A station is any location defined by a
coordinate, composed of theta (T), radial (R), and vertical (Z) vertices.
Coordinate File
The coordinate, or station, file contains the T-R-Z coordinates for stations
and other station information. The Coordinate file contains 52 stations, A
through Z and a through z. You can change the coordinates of the existing
stations. That is, you place the robot in a position or station that you want
the robot to remember. You then teach the station coordinates by saving
the coordinates for that position or station in a coordinate file (*.cor)
stored in NVSRAM. For more information on teaching, refer to the
section on teaching that starts on page 23.
Robot Parameter File
The robot parameters are stored in the VACxxxx.par file, where xxxx is
the four-digit serial number. The parameter file that is delivered with your
robot contains parameters set for your particular robot and application.
You will not need to change them unless you have special circumstances.
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