Atmospheric Pre-aligner Manual
4000-0015 Rev 1
37
NA 23 Pre-aligner I/Os Check vacuum valves and
sensors.
Ensure all cables and
hoses are connected.
12 24 CCD and Chuck Verify the Video Board
functions.
Ensure all cables are
connected.
The Diagnostics Menu displays the current step and its title. Use the >>>
or <<< buttons to select the next or previous step. When the desired step
is displayed, press HERE (ENTER). After each step, press HERE to
return to the Diagnostics Menu.
Starting Diagnostics
To enter Diagnostics mode on the Teach Pendant, access the Equipe
Technologies display and then press CTRL+ D simultaneously. The Teach
Pendant displays the following:
DIAGNOSTICS
ESC-QUIT HERE-GO
If your system has both a robot and pre-aligner, you are prompted to select
Pre-aligner Diagnostics or Robot Diagnostics. Select Pre-aligner
Diagnostics.
In Diagnostics mode, the following keys are recognized.
Key Action
HERE Continues or accepts, similar to Enter
ESC Quits, cancels or aborts
>>> Increments the step or current value
<<< Decrements the step or current value
Θ ON/OFF
Toggles the theta servo
R ON/OFF Toggles the r servo
Z ON/OFF Toggles the z servo
Either Theta Jog Key Selects the theta Axis
Either Radial Jog Key Selects the r axis
Either Z Jog Key Selects the z axis
A Selects all axes
YYes
NNo
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