Vacuum Robot Manual
4000-0315 Rev 1
30
Teaching a Robot and an Indexer
In the following example, note that 114 is ASCII for r and 122 is ASCII
for z. Coordinate Special Item (CSI) 14 defines the axis for each station:
• Station A is used with Indexer axis r (SCSI A, 14, 114)
• Station B is used with Indexer axis z (SCSI B, 14, 122)
• Station Z is the Pre-aligner Chuck station for End Effector 1.
• Station z is Pre-aligner Chuck station for End Effector 2.
In the following steps, CSI 15 is used to store the Wafer Transport Plane
(WTP) value for each station.
1. In Terminal mode, turn servos on by sending SVON command. The
red LED on the controller turns off.
2. Make sure that no obstacles are in the path of the robot. Send your
HOM macro to home all the axes in the system. If you need to adjust
the radial axis mechanical home, index and/or home offset, refer to the
next section.
3. If you are using the Teach Pendant, go to the next step. This step uses
EQT to set up the vertical height of the cassette, first slot, for each
indexer.
• With a cassette on Indexer A, send the command MOVA r,
(value). Keep the value small and repeat the command until the
first slot of the cassette is midway between the slot valve facets.
This point is the Wafer Transport Plane (WTP).
• To display the current height of the indexer, send the command
RCP r Record the value.
• To save the value in the coordinate file, send the command SCSI
A, 15, (recorded value).
• Repeat for Indexer B:
• MOVA z, (value) until correctly positioned
• RCP z
• SCSI B, 15, (recorded value)
4. To set the vertical height of the cassette, first slot, for each indexer
using the Teach Pendant:
• In Teach mode, switch to Indexer mode by pressing CTRL-T.
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