Atmospheric Single-Arm Robot Manual
4000-0016 Rev A
38
Attaching the Robot to the Frame
To properly install the robot, the host system must provide proper
interface mounting. Secure the robot using the mounting holes on the four
corners of the bottom plate of the robot. Use four 3/8-inch bolts and eight
¼-20 leveling screws.
You can use standard mounting hardware to attach the robot to a host
system frame. If you purchased your frame from Equipe, all hardware,
mounting, and leveling brackets are included. If you provide your own
frame, be sure to include leveling brackets to level the robot.
The enclosure for the robot must be rigid enough to prevent any
movement of the cassettes or other stations caused by the high
acceleration loads.
Leveling
Level your system before teaching. For an end effector to work correctly,
the wafers must be parallel to the end effector surface. The cassettes
should be level to gravity, or slightly tilted back to prevent wafers from
“walking” out of the cassette because of vibration.
Because of manufacturing tolerances, the end effector might have a
different angle with respect to gravity at each station. Equipe recommends
that each station is independently adjustable for roll and pitch.
Use the following procedure to level the robot, the arm links, and the end
effector.
1. Level the host system. If the host system load station (load chuck) is
not adjustable, adjust the host system to make it level.
2. Level the robot using the set screws on the robot mounting baseplate.
3.
Disconnect AC power or turn off the robot servo motors by issuing the
SVOF command.
4.
Loosen the bolts securing the robot to the tool using a 3/16 Allen
wrench.
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