Atmospheric Pre-aligner Manual
4000-0015 Rev 1
4
Controlling the Pre-aligner
Either an Equipe Smart Controller (ESC) for single-arm robots or an
Equipe Dual Controller (EDC) for dual-arm robots can control a pre-
aligner. The number of axes in your system determines the specific
ESC/EDC model.
The controller contains the pre-aligner input/output board. For a three-
axis pre-aligner, a Pre-aligner Amplifier Board amplifies the PWM motor-
driver signals to drive the three motors in the Pre-aligner. For a single-
axis pre-aligner, a single AMC driver unit is used rather than an amplifier
board.
The CPU Board has on-board Non-Volatile Static Random Access
Memory (NVSRAM) to store macros and critical files. Firmware is
loaded on EPROMs on the CPU board.
The controller processes the wafer-edge image data from the pre-aligner
Charged Couple Device (CCD). The CCD/LED pairs monitor the edge of
the wafer during wafer alignment. The controller CPU board is equipped
with an on-board Math Coprocessor for processing the image data.
You can use a hand-held Teach Pendant with LCD display or a personal
computer (PC) to control your pre-aligner.
• The Teach Pendant communicates through an RS-232C serial link
from the COM 2 port on the controller and executes macros written by
the user that reside in the controller.
• You can use any standard personal computer using serial
communications. Equipe provides the EQT32 graphical user interface
for controlling your system or you can incorporate your own interface
in your host system. Information for creating your own interface is
given in the Software Manual.
For more information about the controller or about host communications,
refer to the Software Manual.
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