Atmospheric Pre-aligner Manual
4000-0015 Rev 1
25
Verifying Correct Files
The correct files for your pre-aligner must be resident on the controller
NVSRAM. Each unit is delivered with the corresponding files on a
diskette. If the controller is delivered with the unit, the correct files are
already downloaded to the controller.
If you are not sure you have the correct files loaded for your unit, compare
the serial number on the unit with the serial number in each file as
instructed here:
1. Access Terminal mode in EQT or on the Teach Pendant.
2. Enter the command to return the serial number for a pre-aligner. For
an integrated system, enter RSRN 1. For pre-aligner only system,
enter RSRN.
3. The serial number from the Pre-aligner Parameter File is displayed.
Compare it to the number on the pre-aligner manufacturing label. If
the numbers match, you have the correct Pre-aligner Parameter File. If
the numbers do not match, follow the instructions below to copy the
correct file from your diskette.
4. To verify the correct Wafer Parameter File, enter the command
DUMPW. The serial number from the Wafer Parameter File is
displayed. As you press Enter, the file is displayed one line at a time.
If the serial number is not correct, follow the instructions below to
copy the correct file from your diskette.
5. To verify the correct Wafer Calibration File, enter the command
DUMPC. The serial number from the Wafer Calibration File is
displayed. As you press Enter, the file is displayed one line at a time.
If the serial number is not correct, follow the instructions below to
copy the correct file from your diskette.
Copying Files from the Diskette
If any of your files are not correct for your pre-aligner, follow these
instructions to use EQT to download the correct file(s) from the diskette.
1. Load the diskette into the diskette drive.
2. Access the main EQT window.
3. To download a file, press the Download button on the Terminal-mode
window to access the Download dialog.
4. On the Download dialog, specify the file type to download from the
host computer to the controller. When you select a file type, such as
parameter, the available files for that type are displayed. To display
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