Strasbaugh nTellect 7AF - Section 4

Atmospheric Pre-aligner Manual
4000-0015 Rev 1
v
Table of Contents
Overview..............................................................................................................................1
Pre-aligner Axes..............................................................................................................1
Wafer Sizes .....................................................................................................................2
Pin Loading and Chuck Loading.....................................................................................2
Fast Align Option............................................................................................................3
Summary of Equipe Pre-aligners.....................................................................................3
Controlling the Pre-aligner..............................................................................................4
Aligning a Wafer.............................................................................................................5
Regulatory Compliance......................................................................................................7
CE Mark..........................................................................................................................7
EMC and ESD Protection ...............................................................................................7
Safety Features ................................................................................................................8
Cable Connectors ........................................................................................................8
Safety Labels...................................................................................................................9
High Voltage Label .....................................................................................................9
Manufacturing Label ...................................................................................................9
Facilities Requirements....................................................................................................11
Environmental...............................................................................................................11
Electrical........................................................................................................................11
Mechanical ....................................................................................................................11
Vacuum .........................................................................................................................12
Installing a Pre-aligner....................................................................................................13
Unpacking .....................................................................................................................13
Mechanical Setup and Leveling ....................................................................................14
Connecting the Pre-aligner to the Controller ................................................................15
Connecting the Vacuum Line........................................................................................17
Accessing a User Interface............................................................................................17
Connecting the Teach Pendant..................................................................................18
Installing the EQT 32 Interface.................................................................................19
Verifying Connections ..................................................................................................20
Preliminary Teaching ....................................................................................................20
Operating a Pre-aligner ...................................................................................................21
Pre-aligner Files ............................................................................................................21
Pre-aligner Parameter File.........................................................................................21
Wafer Parameter File.................................................................................................22
Wafer Calibration File...............................................................................................24
Verifying Correct Files..............................................................................................25
Copying Files from the Diskette ...............................................................................25
Commands.....................................................................................................................26
Pre-aligner Macros........................................................................................................27
Macro for Aligning....................................................................................................28
Robot Macro for Fast Align Option..........................................................................30
Using the Macros to Verify Positions ...........................................................................32