Atmospheric Pre-aligner Manual
4000-0015 Rev 1
46
15. To restore speed and acceleration, use the RSA command and then the
SAV command.
Scaling Factor Test
Use the Scaling Factor Test to verify the scaling factor on each axis or to
verify that the Mechanical Ratio parameter in the Pre-aligner Parameter
file is correct. You need a measuring device.
The display reads:
where tttttt is the theta position in 0.01° and rrrrrr is the radial position
expressed in 0.001-in.
Manually move the axis you want to check. Measure the physical
movement, that is, the displacement of the axis, not the absolute position.
Compare the result with the reading on the Teach Pendant.
t: ttttttt
r: rrrrrrr
z:
Move Axes
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