Atmospheric Single-Arm Robot Manual
4000-0016 Rev A
12
Protection against electrostatic discharge (ESD) is designed into the robot.
The robot can withstand ESD up to 15 kV, which is higher than current
EMC requirements. If you attach a Teach Pendant, the system is more
susceptible to ESD and RFI problems. Instructions for grounding the
TTR-100 and TTR-200 to eliminate ESD related problems are given in
“Connecting the Teach Pendant” on 42.
Safety
The atmospheric single-arm robot complies with the LVD and MD safety
directives. The safety features are described in this section.
Laser Radiation
Equipe robots with or without laser scanners are sold solely as a
component intended for incorporation into another product. The laser
scanner is used to detect the presence of wafers and whether or not they
are cross-slotted.
When approved Laser Scanning devices are installed as an option, the
Equipe Robotic Systems are CLASS 1 Laser Products, in accordance with
CDRH Performance Standard 21 CFR Chapter 1, Sub-Chapter J.
Although Class 1 lasers do not pose a hazard, avoid staring into the laser
beam or direct exposure to the laser beam. Two warning labels are affixed
to the laser scanner.
End users reselling equipment containing laser devices must submit their
own CDRH filing, Laser Product Report, to comply with 21 CFR Chapter
1, Sub-chapter J.
Emergency Stop (EMS/MOFF)
The Equipe robot control system has an emergency stop circuit. The
emergency stop circuit, when activated, overrides all other controls,
removes power to the motor amplifiers, and causes all motion to stop.
Equipe does not provide a robot stop on the system, but a TTR-200 Teach
Pendant has an EMERGENCY STOP button. (See page 23 for
information on the Teach Pendant.)
Emergency Stop (EMS) or Motor Off (MOFF) is hardware-activated.
STOP is an optional feature and is software-activated. The inputs are on
the I/O Board located in the controller:
• EMS or MOFF. If the EMS/MOFF input on the I/O board is activated,
the dc power to the amplifiers is cut off, which turns off the servo
motors.
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