Atmospheric Pre-aligner Manual
4000-0015 Rev 1
14
Mechanical Setup and Leveling
Before installing a pre-aligner, make sure you have a baseplate made of
either 0.500+ in thick aluminum or 0.375+ in thick stainless steel.
1. Position the Pre-aligner to allow the robot end effector to pick and
place wafers.
• For a pin-loading pre-aligner, orient the Pre-aligner so the Blade
End Effector clears the pins.
• For a chuck-loading pre-aligner, make sure the Horseshoe End
Effector will not hit the CCD sensors!
2. Verify that the pre-aligner is co-planar to the robot end-effector. The
end effector must be parallel with the wafer surface. If the robot Z
column is not perpendicular to the baseplate, use a leveling plate to
level the pre-aligner chuck surface.
3. Use the four mounting tabs at the corners of the pre-aligner to bolt the
pre-aligner to a mounting baseplate or other frame.
Mounting tabs
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