Atmospheric Pre-aligner Manual
4000-0015 Rev 1
24
Wafer Calibration File
The wafer calibration factors for alignment are stored in the PRE*.cal file.
Calibration factors include wafer size and type, CCD locations, and
offsets. The file contains several sets of factors, one for each size of
wafer.
Equipe sets the values during calibration; do not edit this file or modify the
values.
Index Wafer Calibration File Description
PRE-2636 Serial number
76 Wafer size
0 Wafer type
0 76 Wafer size
1 0 Wafer type
2 1 CCD number
3 3 Number of repetitions
4 3500 Maximum offset
50 Reserved
60 Reserved
70 Reserved
8 2501 CCD position
9 22467 CCD angle
10 1000 Offset correction for Window 0
11 997 Offset correction for Window 1
12 997 Offset correction for Window 2
13 1001 Offset correction for Window 3
14 1060 Offset correction for Window 4
15 1070 Offset correction for Window 5
The above items are repeated for other sizes.
Use the RCT command to Read the Calibration Table. Refer to the
Software Manual for details.
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