Strasbaugh nTellect 7AF - Page 2218

Atmospheric Pre-aligner Manual
4000-0015 Rev 1
23
7
8
6000
5000
Constants used for Fast centering
90 Reserved
10
11
12
13
14
15
15000
10000
5000
15000
10000
5000
Constants used for speeds and accelerations for
Standard align wafer rotation and movement.
16
17
18
19
20
21
15000
10000
5000
150000
10000
5000
Constants used for speeds and accelerations for
Fast align wafer rotation and movement.
22 9000 Flat angle
23 0 Measurement type
24 0 Wafer type
25 -3000 Pin loading position. Use RWL and SWL
commands to read and set.
26 200 Pin unloading or lift position. Use RWU and
SWU commands to read and set.
27
28
300
200
Constants for Fast align
29-37 Lines 29 through 37 are Reserved
38 2588 CCD1 first pixel
39 22520 CCD1 angle
40 Reserved
41 6215 CCD2 first pixel
42 17950 CCD2 angle
43-46 Lines 43 through 46 are Reserved
47 200 Default wafer size
48 0 Default flat type
49 0 Default wafer type
50-56 Lines 50 through 56 are Reserved