Strasbaugh nTellect 7AF - Teaching the Scanner Mapping

Atmospheric Single-Arm Robot Manual
4000-0016 Rev A
58
The first digit represents slot 1 and slot 1 has a wafer. The second digit is
slot 2, and slot 2 has no wafer, and so on.
Teaching the Scanner Mapping
To turn on the power for the scanner, use the command OUTP 3,1 and
enable the scanner using OUTP 2,1.
Line 24 of the Robot Parameter File contains the Scanner Offset. The first
parameter of the Scanner Offset is always 0, the second parameter is the
R-axis Offset, and the third parameter is the Z-axis Offset. As examples:
0, 1750, 320
0, 1500, 320
The type of laser scanner determines the focal point, 1.50 in or 1.75 in.
The instructions here assume 1.75 in, which works in most cases.
The R-axis Offset positions the scanner head to the 1.75 in focal point:
• If the scanner head can touch the first wafer, the R-axis Offset is 1750.
• If the scanner head cannot touch the first wafer due to a physical
obstruction at the base of the cassette, but can touch other wafers, the
R-axis Offset is 1750.
• If the scanner head cannot touch any wafer, the R-axis Offset is 0.
The Z-axis Offset positions the laser emitters just below the first wafer.
• If the scanner head can touch the first wafer, the Z-axis Offset is 320.
•
If the scanner head cannot touch the first wafer, but can touch other
wafers, the Z-axis Offset is calculated as 320 – (Slot# - 1) x Pitch/10.
• If the scanner head cannot touch any wafer, the Z-axis Offset is 320.
When teaching the scanning coordinates, you move the robot arm to a
position where the top of the sensor is level with the top of, and touching,
the center edge of a wafer in the first slot. The offsets then move the
sensor to the correct coordinates for a good scan. The sensor should not
“see” a wafer until the Z-axis motion. If a wafer is detected before the
scan motion begins, the scan fails and the robot arm retracts.
In our teaching example, the scanning coordinates for Station “a” scan the
input cassette for wafers. This example gives instructions specific to the
Teach Pendant. Before you teach the scanner, ensure that all components
are level.