Atmospheric Single-Arm Robot Manual
4000-0016 Rev A
59
1. Access Terminal Mode on the Teach Pendant.
2. Check the system status by running the STAT command. Verify that
STAT returns an OK indication. A normal return is 1000 or 1008.
3. Enter DCSI and the station name. This entry runs the DCSI macro that
sets the Default Coordinate Special Items for the station. No response
is returned.
4.
Access Teach Mode.
5.
Press CTRL + S to access the Scanning Mode. An asterisk appears
next to the station identifier in the right corner of the Teach Pendant
screen.
6.
Press the CHANGE COORD (D) key, select the correct station letter,
and press Enter.
7.
Toggle off the servo motors.
8. Physically move the robot arm so that the top of the sensor head is
flush with the top of the wafer seated in slot #1 of the cassette, and
touching the center edge of the wafer.
• If the scanner head cannot touch the first wafer, but can touch
another wafer, teach the scanner using the next available slot
rather than slot 1.
• If the scanner head cannot touch any wafer, position the scanner
head 1.75 in from the wafer. Be sure the top of the wafer is level
with the top of the scanner head.
9.
Press Enter. The Teach Pendant displays the message “DO YOU
WANT TO CALIBRATE? Y/N”. Press Y. The robot will run the
TSCN macro and stop.
10. Press CTRL + X to exit from Teach Mode.
11.
Run MAP Station where the station is the one you just taught.
12.
When the scan finishes, enter RSS. Verify that the results correctly
reflect the position of the wafers within the cassette.
13.
Enter RSA.
14.
Enter SAV.
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