Atmospheric Pre-aligner Manual
4000-0015 Rev 1
59
Glossary of Acronyms, Abbreviations, and Terms
accuracy. For a motion system, the difference between the actual position
and the desired position.
ac. Alternating current.
cassette. A device that holds a substrate. A wafer cassette has 13 to 26
slots to hold wafers. An FPD cassette usually has less than ten slots.
Cartesian coordinates. Coordinate system with three coordinates: x, y,
and z.
CCD. Charged Couple Device. For the pre-aligner, these sensors detect
light and convert the light intensity into a digital value, units per mm
2
.
CE. La Communauté Européenne
CE Mark. CE Mark indicates European regulatory compliance and is
required on all products marketed in the European Community (La
Communauté Européenne). The CE Mark icon is attached to products as a
declaration of conformity. For most semiconductor equipment
manufacturers, three directives under CE Mark apply: EMC Directive,
Low Voltage Directive, and Machinery Directive. The EMC Directive
(Electromagnetic Compatibility) is an effort to prevent electrical
equipment from causing Electromagnetic Interference (EMI) with other
electrical equipment, especially in communication equipment. Safety
directives are for electrical safety of equipment (Low Voltage Directive)
and mechanical safety of equipment (Machinery Directive).
COC. Certificate of Compliance. Used by Equipe to ensure that the
delivered product meets the customer requirements.
command. For the controller, a command can be called directly or from a
macro. A macro can contain several commands and/or macros. A
command cannot call a macro.
dc. Direct current.
EDC. Equipe Dual Controller. The EDC can control a dual-arm robot
and any other components in the system.
EMC. Electromagnetic Compatibility. The ability of a device, apparatus,
system, or equipment to operate in a specified environment without
exceeding specified levels of radiated or conducted EMI. Also refers to
the ability of a device, apparatus, system, or equipment to operate in the
presence of electromagnetic fields generated by external sources, such as
ESD.
EMI. Electromagnetic Interference caused by electrical noise usually in
the high frequency spectrum. EMI can be either conducted or radiated
electromagnetic energy.
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