Atmospheric Pre-aligner Manual
4000-0015 Rev 1
38
NVSRAM Test
NVSRAM Test first checks the Non-Volatile Static RAM (NVSRAM) and
then checks the files.
If the NVSRAM is not correctly formatted, the message NVSRAM NOT
READY is displayed. Refer to the FRMT 313 command for formatting
information. After you format the NVSRAM, download the required files.
These files were delivered on a diskette with your system.
If the NVSRAM is OK, the parameter, wafer parameter, and wafer
calibration files are checked. Messages report the status of each file:
• Check-Sum OK indicates the space allocation for file is not corrupt.
• File Not Open indicates there is no file. Download the specified file.
• Check-Sum Bad indicates the file is damaged. Download the file
again. For the macro file, download the file and send the SMCR
command to save the macro file to NVSRAM.
Galil & I/O Test
To test the Galil board, the diagnostics software attempts to communicate
with the Galil board. During this step, a message indicates whether Galil
passed or Galil failed.
If the test fails, there is an error in communication between the Galil board
and the CPU board. Contact Equipe Customer Support for further
instructions.
Testing Ports A and B
The I/O Board Test verifies communication for each I/O port. If the port
communications work, the message Port A, B OK is displayed and the
tests continue.
If a port communication fails, the message Port X,,, BAD is displayed,
where X is the port designator. Ensure that all cables are correctly
connected. The Main Menu is displayed. Repeat the test. If the test fails
a second time, check the internal cable connections and jumper settings. If
the jumper settings are correct, replace the I/O board.
Testing Input G
In the display, the order of XXXXXXXX, Bit 0 to Bit 7, is left to right.
Bit 0 XXXXXXXX Bit 7
That is, the left-most digit is the least significant bit (LSB) and the right-
most digit is the most significant bit (MSB).
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