Atmospheric Pre-aligner Manual
4000-0015 Rev 1
3
Fast Align Option
To further increase the throughput of three-axis chuck-loading pre-
aligners, Equipe offers the Fast Align Option. A combination of faster
hardware movement, faster collection of CCD data, and firmware
algorithms speeds up the overall alignment process.
Information for using the Fast Align Option in conjunction with the robot
is given in the chapter on Operating a Pre-aligner.
Summary of Equipe Pre-aligners
The PRE-050 Pre-aligner has one axis and no pin assembly to move the
wafer in the r- and z-directions. The t axis rotates the wafer and the robot
lifts the wafer and centers it on the chuck. The PRE-050 is used for
applications where throughput is not a critical issue.
The PRE-200 and PRE-201 have three axes to center and align the wafer.
A difference in hardware makes the PRE-200 a chuck loader and the PRE-
201 a pin loader.
The PRE-300 and PRE-301 have three axes to center and align the wafer.
The physical dimensions are larger than those of a PRE-200 or PRE-201
Pre-aligner to accommodate 12-in (300-mm) wafers. A difference in
software settings makes the PRE-300 a chuck loader and the PRE-301 a
pin loader. You can reset the software to change the load type by using the
RWL and SWL commands, as instructed on page 32.
The PRE-350 has one axis, the t axis, to center and align the wafer. The
physical dimensions are larger than those of a PRE-050 to accommodate
12-in (300-mm) wafers.
Model Number
of Axes
Wafer Sizes Load
Type
End
Effector
PRE-050 1 3 to 8 in (76 to-200 mm) Chuck Horseshoe
PRE-200 3 3 to 8 in (76 to-200 mm) Chuck Horseshoe
PRE-201 3 3 to 8 in (76 to-200 mm) Pin Blade
PRE-300 3 8 and 12 in (200 and 300 mm)
with optional 6 in (150 mm)
Chuck Horseshoe
PRE-301 3 8 and 12 in (200 and 300 mm)
with optional 6 in (150 mm)
Pin Blade
PRE-350 1 8 and 12 in (200 and 300 mm)
with optional 6 in (150 mm)
Chuck Horseshoe
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