Atmospheric Pre-aligner Manual
4000-0015 Rev 1
22
61563,20339,31027 Operational acceleration
300,300,400 Error limit or following error
250,15,35 GN, Proportional gain
0,0,0 Servo acceleration forward
50,10,10 KI, Integral gain or Response to error
9999,9999,9999 TL – Torque limit
1000,120,150 ZR, Derivative gain or Damping element
4352,768,768 Ramp value, controls radius of the S-curve
0,0,-3000 Customized home position
0,-20227,-2025 Home offset in encoder counts
180000,39370,100000 Mechanical ratio used in scaling
0,1,0 Second number is used in encoder counts.
0,0,0 Reserved—Not used
61655,20369,10957 Operational deceleration
-66000,-6000,-6000 Negative software motion limit
300000,6000,6000 Positive software motion limit
0,0,0 Reserved—Not used
0,0,0 Reserved – Not used
You can reset some parameters, such as speed and acceleration, with
commands. You can also change parameters by editing the parameter file;
refer to the User Interface Manual.
Wafer Parameter File
The wafer parameters are stored in the PRE*.waf file, which defines the
wafer parameters for controller calculations. The Fast parameters are for
the Fast Align option. If you do not have the Fast Align option, the
Standard parameters determine the alignment speed and acceleration.
The second column in the table contains example values. The values set
by Equipe differ among various pre-aligner models. Your Wafer
Parameter File might have different values than the example.
Line
Number
Example
File
Description
1 PRE-3880 Serial number. Use DUMPW command to read.
2
3
4000
20000
Constants used for centering
4
5
200
20000
Constants used for finding flat
6 3 Chuck dead band
To Next Page
Loading...
