Atmospheric Pre-aligner Manual
4000-0015 Rev 1
32
Using the Macros to Verify Positions
Before operating the pre-aligner, verify that the pin heights for loading,
chuck (waiting), and unloading are correct. You use your PINL, PINC,
and PINU macros in the following instructions.
Note that the PRE-300 and PRE-301 can be either pin-loading or chuck-
loading. To change from one to the other, simply reset the pin height for
the loading position and install the correct end effector.
Loading Position
The loading position varies between pin-loading and chuck-loading pre-
aligners:
• For pin-loading pre-aligners, the loading position determines how high
the wafer is lifted. The pins should lift the wafer above the chuck
about 0.19 in (4.83 mm) for a PRE-201 or about 0.28 in (7.1 mm) for a
PRE-301.
• For chuck-loading pre-aligners, the loading position hides the pins
completely under the top cover.
To verify that the loading position of the pins is correct, execute the PINL
macro. From the command line in Terminal mode, enter:
PINL
If the pins are not set correctly, follow these instructions to adjust them.
1. Access Terminal mode on the Teach Pendant or in EQT.
2. To read the current setting, send the command RWL.
3. Approximate the correct setting and enter that value using the SWL
command.
4. To restore the speed and acceleration for all axes, use the RSA
command, either RSA a for an integrated system or RSA A for a pre-
aligner only system.
5. To save the new setting, send the command SAV.
6. Repeat your test using the PINL macro. Adjust the setting as necessary
to correct the loading position.
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